The technical progress in key technologies as microelectronics, telecommunication and micro-electro-mechanical systems (MEMS) proceeds rapidly. Classical education at universities has to be accomplished by additional learning activities to fulfill the requirements of life-long learning in companies and research institutions. The Internet techniques offer the technical basis to provide engineers...

We study the existence and stability of periodic solutions of a canonical mass-spring model of electrostatically actuated micro-electro-mechanical system (MEMS) by means of classical topological techniques like a-priori bounds, Leray-Schauder degree and topological index. A saddle-node bifurcation is revealed, in analogy with the autonomous case.

MEMS (micro-electro-mechanical-systems) device has been a promising and fascinating topic in both mechanical and electrical engineering domains for decades with the revolutionary contributions to the contemporary micro-scale instruments especially for the micro-actuator and micro-sensor. Among the versatile material foundation to build up the MEMS device, silicon wafer is preferred to due to th...

Metamaterials, materials that are constructed with arrays of small elements have significant potential to provide material properties that are useful for electromagnetic applications but are not found in nature. Slight changes to a repeated unit cell can be used to tune the effective bulk material properties of a metamaterial, replacing the need to discover suitable materials for an application...

As more MEMS-based products and applications move from research to commercialization, there is a growing array of choices for design and analysis software tools. Increasingly, mainstream CAD and CAE tools can be relied on to deliver robust capabilities previously available only with specialized, often expensive, MEMS-focused tools. Given the technical and business advantages of mainstream tools...

MEMS (Micro Electro Mechanical System) gyroscopes have been widely applied to various fields, but MEMS gyroscope random drift has nonlinear and non-stationary characteristics. It has attracted much attention to model and compensate the random drift because it can improve the precision of inertial devices. This paper has proposed to use wavelet filtering to reduce noise in the original data of M...

We present a single crystalline silicon optical phased array using high-contrast-gratings (HCG) for fast two dimensional beamforming and beamsteering at 0.5 MHz. Since there are various applications for beamforming and beamsteering such as 3D imaging, optical communications, and light detection and ranging (LIDAR), it is great interest to develop ultrafast optical phased arrays. However, the be...

Accurately measuring displacement of mechanical components on micro-scale devices is often the limiting factor affecting resolution for many MEMS-based sensors including accelerometers, Coriolis-based gyroscopes, pressure sensors, temperature sensors, and magnetometers. This paper introduces a novel electro-optical displacement detection scheme which has been applied to navigation-grade MEMS ac...

A submicroscale flow sensor has been developed that consists of a suspended hot film and carbon nanotube (CNT) fins. Flow measurement experiments, together with a theoretical model, revealed the advantages of the use of CNT fins. The suspended metal film reduces heat loss and the CNT fins enhance the heat transfer to the fluid flow. Herein, the working principle of the CNT fins is presented in ...

A bandwidth-tunable filter has been demonstrated based on a micro-electro-mechanical-system (MEMS) actuated single-crystalline silicon microtoroidal resonator. Bandwidth is tuned from 2.8 to 78.4 GHz by voltage control, the largest bandwidth tuning range reported to date to our knowledge in resonator-based filters. A 21.8 dB extinction ratio is attained as a dynamic add-drop filter.