This paper investigates the dynamic response of a class of electrostatically-driven microelectromechanical (MEM) oscillators. The particular systems of interest are those which feature parametric excitation that arises from forces produced by fluctuating voltages applied across comb drives. These systems are known to exhibit a wide range of behaviors, some of which have escaped explanation or p...

This paper concerns the experimental validation of some mathematical models previously developed by the authors, to predict the static behaviour of microelectrostatic actuators, basically free-clamped microbeams. This layout is currently used in RF-MEMS design operation or even in material testing at microscale. The analysis investigates preliminarily the static behaviour of a set of microcanti...

The performance of micromirrors in terms their maximum deflection is often limited due to mechanical constraints the design. To increase range achievable angles, we present a novel concept which free-lying sphere with flat side as reflector can be rotated. Due large forces needed move sphere, multiple electrostatic actuators are used cooperatively rotate iterative steps by impacts and friction....

In this paper, analytical closed-form expressions to accurately estimate the pull-in characteristics of an electrostatically-actuated doubly-clamped nanobeam are derived and examined. In this regard, a coupled electro-mechanical problem for the nano-actuator is first presented assuming a single mode approximation while taking into account all the possible structural, electrical and nanoscale ef...