A new illumination system for mask aligner lithography is presented. The illumination system uses two subsequent microlens-based Köhler integrators. The second Köhler integrator is located in the Fourier plane of the first. The new illumination system uncouples the illumination light from the light source and provides excellent uniformity of the light irradiance and the angular spectrum. Spatia...

background: carpet weaving is an occupation that requires sufficient and appropriate lighting. the lighting in carpet weaving workshops affects the productivity and the physical and mental health of workers. therefore, the evaluation of the illumination and the identification of work stations requiring lighting modifications will be helpful in promotion of the health and safety of workers in ca...