We describe a self-limiting, low-energy argon-ion-milling process that enables noncircular device patterns, such as squares or hexagons, to be formed using precursor arrays of uniform circular openings in poly(methyl methacrylate) defined using electron beam lithography. The proposed patterning technique is of particular interest for bit-patterned magnetic recording medium fabrication, where sq...

Diffraction gratings are very convenient elements for coupling out-of-plane light in planar waveguides of sub-micronic thickness. They have been investigated in dielectric [1] and highindex waveguides [2], and a platform for modeling has been created [3], but technology should still be improved for giving gratings efficient and simple as modeled. Standard methods like reactive ion etching throu...

Techniques for scalable fabrication of one-dimensional or quasi-one-dimensional nanowires are of great importance to observe quantum size effects and build quantum information devices. In this work, we developed a technique for size reduction of both lateral and freestanding tungsten composite nanostructures using focused-ion-beam (FIB) thinning. Different exposure times and ion-beam currents w...

We studied the influence of focused ion beam milling ridge waveguides on lasing parameters edge-emitting lasers, based a separate confinement double heterostructure. It is shown that there are three degrees influence, according to etching depth: modification waveguide properties only, decrease in efficiency without changing threshold current, and simultaneous deterioration current with signific...

The standard preparation technique for micro-sized samples is focused ion beam milling, most frequently using Ga+ ions. The main drawbacks are the required processing time and the possibility and risks of ion implantation. In contrast, ultrashort pulsed laser ablation can process any type of material with ideally negligible damage to the surrounding volume and provides 4 to 6 orders of magnitud...

Solid-state nanopores can be fabricated in a variety of ways and form the basis for label-free sensing of single nanoparticles: as individual nanoparticles traverse the nanopore, they alter the ionic current across it in a characteristic way. Typically, nanopores are described by the diameter of their limiting aperture, and less attention has been paid to other, fabrication-dependent parameters...