Fabrication defects and perturbations affect the behavior of a vibratory MEMS gyroscope sensor, which makes it difficult to measure the rotation angular rate. This paper presents a novel adaptive approach that can identify, in an online fashion, angular rate and other system parameters. The proposed approach develops an online identifier scheme, by rewriting the dynamic model of MEMS gyroscope ...

A study about the piezoresistive Micro-Electro-Mechanical Systems (MEMS) cantilever for a chemical sensitive mass based sensor has been carried out to enhance sensor sensitivity. The sensitive region attracts the CO2 molecules there by introducing the stress concentration region (SCR). Three types of SCR geometry designs were first analysed using Intellisuite software to study the effect of str...

The demand for continuous glucose monitoring systems is greater than ever. The microelectromechanical systems (MEMS) approach has the advantage of being relatively easy to upscale to a commercial level; the preferred MEMS technique would be to run several detectors at once and, through the improved statistics, get a both more accurate and more reliable device than is currently available. Lab-on...

The RF MEMS technology has a great potential to replace conventional switching techniques and it can offer highly miniature switches and sensors with superior RF performance. The main principle of a RF MEMS based power senor is based on sensing the attractive electrostatic force between the signal line and a free standing electrode that is suspended at a small distance from the signal line. Key...

In this paper we present a new slot antenna with an embedded temperature sensor for remote sensing in harsh environment applications. When the antenna is illuminated with a plane wave it returns a signal. The returned signal’s frequency is modulated by the loaded capacitance formed by an array of MEMS bimorph (metal-dielectric) cantilevers. The MEMS cantilevers deflect downwards when the temper...

Wheelchairs are used by the people who cannot walk due to physiological or physical illness, injury or any disability. Recent development promises a wide scope in developing smart wheelchairs. The present article presents a gesture based wheelchair which controls the wheelchair using hand movements. The system is divided into two main units: Mems Sensor and wheelchair control. The Mems sensor, ...

Wireless Sensor Networks (WSN) have gained wide popularity and have increased tremendously in recent time due to growth in Micro-Electro-Mechanical Systems (MEMS) technology. WSN has the potentiality to connect the physical world with the virtual world by forming a network of sensor nodes. Energy saving of sensor nodes is a major design

Nonlinear dynamic responses of a Micro-Electro-Mechanical Systems (MEMS) mirror with sidewall electrodes are presented that are in close agreement with previously-reported experimental data. An analysis of frequency responses reveals softening behavior, and secondary resonances originated from the dominant quadratic nonlinearity. The quadratic nonlinearity is an electromechanical coupling effec...

In this report we introduce the procedure for performing a thermo mechanical design and analysis of thermal GaAs-based MEMS devices. It will provide the procedure how thermal analysis should be made and model equations used to describe conduction, convection, radiation and mechanical effects caused by nonhomogenous temperature distribution. This is demonstrated on the design of Micromechanical ...

Because weapon systems, vehicles, and most communication systems all generate magnetic fields, magnetic sensors can provide useful military information. There has been significant recent progress in magnetometry. This progress includes chip scale magnetometers, magnetoelectric sensors, devices with much larger magnetoresistance (MR) and an ARL invention, the MEMS flux concentrator that is neede...