Many types of micro-electro-mechanical-system (MEMS) based products are currently employed in a variety of applications. However, high friction in these systems is a problem which limits the development of MEMS devices in which sliding contacts are involved. The aim of this research is to evaluate the effect of boundary slip on the hydrodynamic friction in a low load lubricated MEMS, in particu...

This paper proposes a Micro-electro-mechanical (MEMS) capacitive pressure sensor that relies on the movable electrode displaced like a flat plate equal to the maximum center deflection of diaphragm. The diaphragm, movable electrode and mechanical coupling are made of polysilicon, gold and Si3N4, respectively. The fixed electrode is gold and the substrate is Pyrex glass. This proposed method inc...

The mechanical testing of micro-electro-mechanical systems (MEMS) and nano-electro-mechanical systems (NEMS) requires precise measurements of displacement and strain in the nanometer scale. Integrated testing devices, including specimens, actuators and sensors, were designed and fabricated to overcome the aligning and gripping difficulties faced by previous separated micromechanical testing app...

This paper proposes an adaptive observer-based scheme to control fractional-order chaotic micro-electro-mechanical-systems (MEMS). The model of a system exhibits the dynamic behaviour physical more accurately than similar integer-order one. An considering unknown parameters is presented for micro-electro-mechanical-system. To handle existence parameters, law consists both estimated and also sta...

This paper presents a study on the design and analysis of capacitively based Micro-Electro-Mechanical Systems (MEMS) sensor for continuous glucose monitoring (CGM) applications. This sensor consists of Parylene diaphragm, which is driven by a magnetic field and situated inside a micro chamber. A biocompatible sensing solution fills the micro chamber, which is separated from its surroundings by ...

Shape memory alloys (SMAs) impart a potential application in a wide range in microand nano-industrial world. Classic properties such as free recovery or pseudo-elasticity still needed further specifications in smart materials or micro-actuators applications. Nowadays, a primary goal is achieved that these materials offer a price-competitive advantage compared to other functional materials desig...

We have proposed a unified approach to the modeling and study of developments in the field of MEMS and Nanotechnology and its application in futuristic Nano-enabled Cells. We have proposed a novel to approach reliability of MEMS enabled fuel cells. We know that reliability and accurate prediction of properties in nano domains remains a major challenge where still theories are being developed to...

We report a MEMS (Micro-Electro-Mechanical Systems)-based microbial fuel cell (MFC) that produces a high power density. The MFC features 4.5-μL anode/cathode chambers defined by 20-μm-thick photo-definable polydimethylsiloxane (PDMS) films. The MFC uses a Geobacter-enriched mixed bacterial culture, anode-respiring bacteria (ARB) that produces a conductive biofilm matrix. The MEMS MFC generated ...

As a result of the unpredictable nature extreme environments (including temperature, humidity, impact, and other factors), micro-electro-mechanical systems (MEMS) solid-state fuze control modules have an urgent requirement for MEMS switch (MEMS-S3). In particular, this must remain stable without any energy input after state transition (i.e., it be bistable). paper, bistable (MEMS-bS3) is design...

MEMS is an acronym for Microelectro Mechanical Systems, it defines mechanical structures fabricated with IC processing on (most often) silicon wafers. In Europe, MEMS is labeled Microsystems and in Japan it is labeled Micromachines. The term MEMS evolved in the United States in the 1990s. Prior to that period the technology was labeled silicon micromachining . MEMS defines the technology; not s...