Nanotechnology brings together various functional areas for interdisciplinary research, making it necessary for them to reside in a single facility. The conjoining of biology, biomedical engineering, and bio-nano-micro-electro-mechanical systems (MEMS) with semiconductor and MEMS processing requires that these technologies coexist in ultraclean facilities, while the facility designs and operati...

Within the past decade, researchers in the field of tissue engineering have recognized the need for newmaterials with soft and elastic properties. As a result, many groups have focused on the synthesis, characterization, and application of materials with a wide range of biodegradable and elastomeric properties.1 The combination of these polymers with Micro–Electro–Mechanical Systems (MEMS) tech...

This paper proposes the result of hardware in the loop simulation (HILS) for performance evaluation about a small attitude heading reference system (AHRS) based micro electro mechanical system (MEMS) suitable for small unmanned underwater vehicle. Unmanned underwater vehicles (UUV) have many applications in scientific, military, and commercial area due to its autonomy and the navigation system ...

Radio Frequency Micro-Electro-Mechanical-Systems (RF MEMS) based switches are expected to play a key role in the field of microwave switching. Traits like low-loss performance; zero-power consumption and very low inter-modulation distortion have made these switches well suitable for high-performance microwave and millimeter-wave circuits. The design of RF MEMS switches, however, require sophist...

This paper proposes a Micro-electro-mechanical (MEMS) capacitive pressure sensor that relies on the movable electrode displaced like a flat plate equal to the maximum center deflection of diaphragm. The diaphragm, movable electrode and mechanical coupling are made of polysilicon, gold and Si3N4, respectively. The fixed electrode is gold and the substrate is Pyrex glass. This proposed method inc...

-Barometer is a well-organized tool for determining atmospheric pressure. The altimeter is a tool which calculates the vertical distance in accordance with a reference level. The barometric altimeter, computes the altitude according to the atmospheric pressure. Accuracy and size are the major issues in altimetry. On the other hand the present day altimeters employing conventional pressure senso...

Micro-electro-mechanical system (MEMS) mirrors are widely used for optical modulation, attenuation, steering, switching and tracking. In most cases, MEMS mirrors are packaged in air, resulting in overshoot and ringing upon actuation. In this paper, an electrothermal bimorph MEMS mirror that does not generate overshoot in step response, even operating in air, is reported. This is achieved by pro...

System Dynamics and Adaptive Control for MEMS Gyroscope Sensor Juntao Fei1,2 and Hongfei Ding2 1Jiangsu Key Laboratory of Power Transmission and Distribution Equipment Technology 2College of Computer and Information, Hohai University, Changzhou, 213022, P. R. China Abstract: This paper presents an adaptive control approach for Micro‐Electro‐Mechanical Systems (MEMS) z‐axis gyroscope sensor....

Micro Electro-Mechanical Systems (MEMS) have been developed for years and find a wide range of applications. Nevertheless, there is still a lack of efficient collaboration between expert teams involved in MEMS design to enable an efficient multidisciplinary approach. Furthermore, the shrinking of the systems’ size and their growing integration level require to design HW and SW subsystems in a m...

Modeling a MEMS (Micro Electro-Mechanical Systems) electrostatic actuator in electrical domain is important for system simulation of the actuator along with its associated electronics. For instance, an integrated MEMS resonator used in a serial I/O PLL design modeled in electrical domain enables to optimize the system with the rest of the electronics. In this work, we have developed a simplifie...