Recent advances in the field of silicon micro-fabrication techniques and silicon-based Microelectromechanical Systems (MEMS) have led to the possibility of a new generation of micro heat engines for power generation and micro air-vehicle propulsion applications. The design for a silicon-based, micro gas turbine generator capable of producing 10-50 Watts of power in a volume less than 1 cm3 whil...

We report on the fabrication of nanofluidic channels directly buried in silicate glass with transverse widths down to less than 50 nm using three-dimensional (3D) femtosecond laser direct writing. Using this technique, integrated micro-nanofluidic systems have been produced by simultaneously writing micro- and nanofluidic channels arranged into various 3D configurations in glass substrates. The...

Technological problems for realization of Micro Electro-mechanical System (MEMS) are discussed and an introduction of smart materials (PZT) is encouraged. The film formation and micromachining technology are discussed in integration of PZT thin films into MEMS. Further developments are proposed on PZT micro sensors and actuators with special emphasis laid on exploration of new application field...

The fabrication technologies and the performance of flexible nanowire light emitting diodes (LEDs) are reviewed. We first introduce the existing approaches for flexible LED fabrication, which are dominated by organic technologies, and we briefly discuss the increasing research effort on flexible inorganic LEDs achieved by micro-structuring and transfer of conventional thin films. Then, flexible...

This paper presents state-of-the-art micro and nano-fabrication techniques for biodegradable polymers. Replication molding, using a rigid or elastic master, can pattern structures on a polymer surface in a submicron resolution at a low cost. Layer-by-layer rapid prototyping methods are promising in producing controlled release units with complicated geometries, release mechanisms and the abilit...

Mesoscopic additive/subtractive material processing (Meso A/SMP) is a solid freeform fabrication technique capable of producing engineering parts in mesoscopic (100 micron to several millimeters) scales. This process integrates silicon processing, electroplating, hot pressing, casting, and traditional machining methods to provide opportunities for 3D layer fabrication and parallel production, a...

This communication reports on the design, fabrication and testing of special high temperature Si/SiN based micro-hotplates as micromachined platforms for micro-SOFCs. Different designs and materials have been evaluated to realise micro-heating platforms compatible with spray pyrolysed anode, cathode and electrolytes materials. The potential of these micromachined platforms for further integrati...

The metals take a apart place in the materials range used at MEMSs fabrication, in special of associated materials, while of thin metals films are used in mediums with different capacities to obtain of masks for microsensors and microactuators. From this group the aluminium, titanium, copper, etc. are distinguished. In that case, the manufacturing problem of them in specific MEMSs conditions is...

By applying the etching via technology, this study proposes a novel front-side etching fabrication process for a silicon-based piezoresistive pressure sensor to replace the conventional back-side bulk micro-machining. This novel structure pressure sensor can achieve the distinguishing features of the chip size reduction and fabrication costs degradation. In order to investigate the sensor perfo...

Future advances in the application of photonic interconnects will involve the insertion of parallel-channel links into Multi-Chip Modules (MCMs) [1]. These will make use of new device-level components such as arrays of Vertical Cavity Surface Emitting Lasers (VCSEL's) [2] or arrays of Micro Cavity Light-Emitting Diodes (MCLED’s) [3] and low power photoreceiver circuits [4]. One of the challenge...