Microfabrication is actually a collection of technologies which are utilized in making microdevices. Some of them have very old origins, not connected to manufacturing, like lithography or etching. Electroplating is technique adapted to produce micrometre scale structures, as are various stamping and embossing techniques. Micro-Components are required in a range of new products such as medical ...

A wide range of opportunities are emerging in the micro-system technology sector for laser micro-machining systems, because they are capable of processing a various types of materials with micro-scale precision. However, few process datasets and machine learning techniques are optimized for this industrial task. This article aims to show how the process parameters of micro-laser milling influen...

Elliptical vibration cutting technology is well-known for its excellent performance in ultraprecision machining of steel materials with single crystal diamond tools. This paper presents two approaches to attain high-performance microand macro-scale sculpturing for steel materials by utilizing elliptical vibration cutting. In order to attain free-form sculpturing in macro-scale, a 4-axis control...

We show that thin diamond coatings can dramatically enhance the performance of micrometer-scale cutting tools. We present a new approach for coating 300 μm diameter tungsten carbide (WC) micro endmills using a tailored seeding method and hot filament chemical vapor deposition (HFCVD) to obtain uniform, conformal, and continuous diamond coatings less than 2 μm in both thickness and grain size. T...

UV laser micro-machining of metallic materials has been used in microelectronic and other industries. Knowledge and-data about the process vary with feature size, material, laser wavelength and pulse duration. This paper carries out experimental and numerical investigation of micromachining of copper using a frequency tripled Nd: YAG laser with 50 nanosecond pulse duration. An axisymmetric mode...

A facility for rapid prototyping of MEMS devices is crucial for the development of novel miniaturised components in all sectors of high-tech industry, e.g. telecommunications, information technology, micro-optics and aerospace. To overcome the disadvantages of existing techniques in terms of cost and flexibility, a new approach has been taken to provide a tool for rapid prototyping and small-sc...

In order to achieve the high-precision and high-efficiency machining of micro-channels for hard brittle materials, authors innovatively proposed a new technology called template-based electrophoretically assisted micro-ultrasonic (TBEPAMUSM). This transfers micro-channel shape punch-pin workpiece material through form micro-channel. At same time, it uses electrophoretic properties ultra-fine ab...