Amorphous carbon (a-C) films have garnered significant attention over the past few decades, principally due to their remarkable thermophysical properties, strong adherence various materials, and good chemical inertness. These intrinsic characteristics of a-C led use as protective overcoats in numerous applications, such hard-disk drives, microelectromechanical systems, biomedical implants. The ...

MEMS (Microelectromechanical Systems) refers to the technology integrating electrical and mechanical components with feature size of 1~1000 microns. MEMS comb accelerometers have been successfully applied for air-bag deployment systems in automobiles. In this paper, the design optimization of a polysilicon surface-micromachined MEMS comb accelerometer is discussed. The device uses folded-beam s...

Nano-and microelectromechanical systems : fundamentals of nano-and microengineering / Sergey Edward Lyshevski. p. cm.-(Nano-and microscience, engineering, technology, and medicine series) Includes index. Includes bibliographical references and index. ISBN 0-8493-916-6 (alk. paper) 1. Microelectromechanical systems. 1. Title. II. Series. TK7875 .L96 2000 621.381—dc201 00-057953 CIP This book con...

A microelectromechanical oscillator with a $0.73\phantom{\rule{0.16em}{0ex}}\textmu{}\mathrm{m}$ gap structure is employed to probe the surface Andreev bound states in superfluid $^{3}\mathrm{He}\text{\ensuremath{-}}\mathrm{B}$. The specularity of increased by preplating it 1.6 monolayers $^{4}\mathrm{He}$. In linear regime, temperature dependence damping coefficient measured at various pressur...