Advances in micromachining techniques have led to the evolution of micro-electromechanical systems (MEMS). These techniques are typically based on semiconductor manufacturing processes, which offer various advantages such as batch manufacturing of miniaturized devices and monolithic integration of microelectronics with the devices. Surface micromachining has been used to construct complex micro...

Micromachining based on femtosecond lasers usually requires accurate control of the sample movement, which may be very complex and costly. Therefore, exploration micromachining without movement is valuable. Herein, we have illustrated manipulation optical fields by controlling polarization or phase to vary periodically then realized certain focal traces real-time loading computer-generated holo...

Investigations on femtosecond laser micromachining of single crystal superalloys with and without plasma-sprayed thermal barrier coatings were conducted under laser fluences ranging from 0.1 J/cm up to 160 J/cm. Micromachining was carried out in air using a titanium:sapphire laser system ( = 780 nm) operating at a repetition rate of 1 kHz and delivering individual pulses of ~150 fs duration. Th...

Form accuracy of a machined component is one of the performance indicators of a machining process. Ultrasonic micromachining is one such process in which the form accuracy of the micromachined component significantly depends upon the form stability of tool. Unlike macromachining, a very small amount of tool wear in micromachining could lead to considerable changes in the form accuracy of the ma...

Introduction: Multi-throw switches are widely used in microwave circuits for switch matrices and true-time-delay phase shifting applications. Traditionally, the multi-throw switch uses GaAs MESFETs and pin diodes to perform its switching function. It exhibits good performances at low frequencies, but deteriorates in the high frequency range beyond 1 GHz [1]. On the other hand, the monolithic mi...

Laser micromachining has the capability to fabricate very small and basic 2.5 D geometric features on a range of materials in the form of laser ablation or irradiation. Short pulsed lasers that can achieve wide range of wavelengths in the form of harmonics of infrared laser beam at 1064 nm wavelength have been a very effective micro-machining tool used for hole drilling, cutting, scribing, trim...

The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desire...

Many conventional technologies for fabricating tissue engineering scaffolds are not suitable for fabricating scaffolds with patient-specific attributes. For example, many conventional technologies for fabricating tissue engineering scaffolds do not provide control over overall scaffold geometry or over cell position within the scaffold. In this study, the use of computer-aided laser micromachin...

Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and systems on the scale of micrometers. Initially micromachining techniques were borrowed directly from the integrated circuit (IC) industry, but now many unique MEMS-specific micromachining processes are being developed. In MEMS, a wide variety of transduction mechanisms ca...