نتایج جستجو برای: optics
تعداد نتایج: 33834 فیلتر نتایج به سال:
2010
S. Partel
S. Zoppel
P. Hudek
A. Bich
U. Vogler
M. Hornung
R. Voelkel
In this paper we describe the use of an Excimer laser for full-field lithography in a Mask Aligner. The DUV light from the Excimer laser is homogenized by using micro lens based optical integrators instead of a macro lens-array. A simulation of the intensity distribution for 5 μm squares was performed to visualize the diffraction effects and to show the potential of 193 nm illumination. It is d...
Journal:
:Publications of the Astronomical Society of the Pacific
2015
نمودار تعداد نتایج جستجو در هر سال
با کلیک روی نمودار نتایج را به سال انتشار فیلتر کنید