A high-performance triaxial fast tool servo (FTS) with the hybrid electromagnetic–piezoelectric actuation and parallel–serial-kinematic structure is reported. Featuring balanced uniform actuation, in this article, a novel axis-symmetric linearized reluctance actuator proposed to generate planar motion parallel, piezoactuated vertical then serially carried by within limited space. Verified finit...

this article studied static deflection, natural frequency and nonlinear vibration of a clamped-clamped microbeam under discontinues electrostatic actuation. the electrostatic actuation was induced by applying ac-dc voltage between the microbeam and electrode plate. in contrast to previous works, it was assumed that length of the electrode plate was smaller than that of the microbeam. in additio...

This paper analyses scale effects for actuator types which are strong candidates for micro-actuation: shape memory alloys (SMAS), electrostatic, electromagnetic and piezoelectric actuators. SMA actuators are studied in detail and compared to the other actuator types on a basis of force, response time, and power densi~. Much of the analysis is based on thermal aspects and scaling effects on both...

This paper presents an analysis of the major mechanical component (the thorax) of the micromechanical flying insect (MFI), a centimeter sized aerial vehicle currently in development at UC Berkeley. We present a description of the kinematics of the mechanism which converts piezoelectric actuation into complex 3D wing motion. A complete non-linear modeling of the system based on the Lagrangian en...