We report the first fabrication of vertical three-dimensional micro-Fresnel lenses with polysilicon materials by surface micromachining technique. Micro-Fresnel lenses play a very important role in micro-optics because of their thin film structures and their ability to achieve very short focal lengths. Although micro-Fresnel lenses have been studied and well understood [ 11, the lens planes usu...

This paper describes a unique capacitively-sensed MEMS-based gyroscope, which utilizes rotating carrier rotate as driven force and responds to an external angular rate of yaw due to the Coriolis Effect. The basic construction and operating principles of the gyroscope are described and illustrated. MEMS-based gyroscope output is presented at different yaw angular acceleration. The raw results ob...

For a micro-Computed Tomography (Micro-CT) system, the microfocus X-ray tube is an essential component because the spatial resolution of CT images, in theory, is mainly determined by the size and stability of the X-ray focal spot of the microfocus X-ray tube. However, many factors, including voltage fluctuations, mechanical vibrations, and temperature changes, can cause the size and the stabili...

Flies use so-called halteres to sense body rotation based on Coriolis forces for supporting equilibrium reflexes. Inspired by these halteres, a biomimetic gimbal-suspended gyroscope has been developed using microelectromechanical systems (MEMS) technology. Design rules for this type of gyroscope are derived, in which the haltere-inspired MEMS gyroscope is geared towards a large measurement band...

Investigations on Novel Platforms of Micro Electro Mechanical Inertial Sensors: Analysis, Construction and Experimentation Laura A. Oropeza-Ramos Inertial sensors, such as gyroscopes and accelerometers are widely used in automotive, biomedical and military industries. Shrinking the scale of micro electro mechanical inertial sensors (MEMIS) increments the spectrum of possible applications for th...

Micro-XRF analysis provides us with elemental maps, which are very useful for understanding the samples under test. Usually, scanning-type elemental mapping is performed. That means, a sample stage is scanned to a fixed X-ray micro beam. XRF analysis is performed at the scanned points, leading to 2D elemental mapping. One of the drawbacks of this technique is the long acquisition time depending...

A new micro-XRF instrument was developed in combination with an atomic force microscope (AFM). A small pinhole of 5 or 10 μm was made on the AFM cantilever. The center of the micro X-ray beam generated by a polycapillary X-ray lens was passed through the pinhole. The present experiment demonstrated that the size of the original X-ray beam of 48 μm produced by the polycapillary lens was reduced ...