This paper presents an analytical modeling of a piezoelectric multi-layer cantilever used as a micro-electro-mechanical-system (MEMS) chemical sensor. Selectively coated microcantilevers have been developed for highly sensitive chemical sensor applications. The proposed piezoelectric chemical sensor consists of an array of multi-layer piezoelectric cantilevers with voltage output in the millivo...

The field of microfluidics has seen breath-taking progress since its beginnings in the 1980s and early 1990s. While much of the initial work was a by-product of mainstream micro-electro-mechanical systems (MEMS) and silicon based fabrication schemes, soon a specialized research field developed. Over the last decade a strong, highly interdisciplinary microfluidics community emerged with roots in...

Corresponding author, Email: [email protected] ABSTRACT In this paper, we present a preliminary research effort towards an effective computer support environment for the design and development of micro-electro-mechanical systems (MEMS). We first identify the characteristics of MEMS product design and development processes and examine the state-of-the-art of MEMS Computer-aided Design (CAD) and s...

With the technological advancement in micro-electro-mechanical systems (MEMS), microfabrication processes along with digital electronics together have opened novel avenues to development of small-scale smart sensing devices improved sensitivity a lower cost fabrication and relatively small power consumption. This article aims provide overview recent work carried out on methodologies adopted dev...

Multiple attractors and their fractal basins of attraction can lead to the loss global stability integrity Micro Electro Mechanical Systems (MEMS). In this paper, multistability a class electrostatic bilateral capacitive micro-resonator is researched in detail. First, dynamical model established made dimensionless. Second, via perturbating method numerical description attraction, multiple perio...

INTRODUCTION Because they have higher isolation and lower insertion loss compared to semiconductor switches, the last decade has seen the development of several types of MEMS (Micro Electro Mechanical Systems) switch. Many of these are electrostatically actuated and so need high drive voltages, limiting the initial gap between the contact points to a few micrometers [1-3]. Such small gaps betwe...

Microelectromechanical Systems (MEMS) is the technology of the very small, and merges at the nano-scale into "Nanoelectromechanical" Systems (NEMS) and Nanotechnology. MEMS are also referred to as micro machines, or Micro Systems Technology (MST). MEMS are separate and distinct from the hypothetical vision of Molecular nanotechnology or Molecular Electronics. MEMS generally range in size from a...

Micro-electro-mechanical system (MEMS) mirrors are widely used for optical modulation, attenuation, steering, switching and tracking. In most cases, MEMS mirrors are packaged in air, resulting in overshoot and ringing upon actuation. In this paper, an electrothermal bimorph MEMS mirror that does not generate overshoot in step response, even operating in air, is reported. This is achieved by pro...

Abstract In this paper, we mainly design two modulation ratios of Al/Ni reactive films, prepare TaN@(Al/Ni) by MEMS (Micro-Electro-Mechanical Systems) technology, and conduct firing experiments using capacitive firing. The experimental results show that the ratio has a large effect on performance bridge action process film can be clearly observed high-speed photography.

The frequency oscillator is a basic component found in many electrical, electronic, and communications circuits systems. Oscillators come variety of shapes sizes, depending on the range employed given application. Some applications need oscillators that generate low frequencies other extremely high frequencies. As result expansion speed modern technologies, new appeared operating at Most wirele...