The hydraulically amplified self-healing electrostatic actuator is an emerging driving component for soft robotics, which composed of a flexible dielectric polymer shell that partially covered by conductive electrodes and filled with liquid dielectric. However, the low permittivity strength remain challenge limits performance. Herein, Peano-hydraulically constructed innovatively integrating bil...

A modified tuning element for a Littrow external cavity laser is demonstrated using microelectromechanical systems technology. The device combines a vertically etched blazed grating, a compound flexure suspension and drive elements for translating and rotating the grating. Tuning is linearized by linking the grating to a remote actuator by a flexible linkage. A simple theoretical model of the l...

Surface micromachining has become an established technology for inertial sensing. Compatibility with standard IC fabrication processes enables monolithic integration of the sensing element and interface electronics for reduced size and power dissipation, simplified packaging, and increased functionality. The need to resolve sub-Angstrom displacements poses a challenge on the interface. Capaciti...

The technique used to control the airflow is based on the electro-hydrodynamic actuator which is also called plasma actuator. This actuator ensures the airflow control thanks to the electric wind created by the electrical corona discharge. This ionic wind is developed at the profile surface tangential to the initial free airflow so that it has a significant effect on the boundary layer flow. Th...

The self-assembling of three-dimensional (3-D) MEMS from polysilicon surface micromachined part is very attractive. To avoid risky external manipulation, the practical use of integrated actuator to perform the assembling task is required. To that goal, this paper presents detailed characteristics of the electrostatic surface micromachined scratch drive actuator (SDA). First, from numerous SDA t...

Arrays of electrostatic MEMS actuators have been fabricated using a modiied, multi-layer SCREAM (Single-Crystal Reactive Etching and Metallization) process. The devices consist of released, torsionally suspended grids with high aspect ratio single-crystal silicon (SCS) tips. They can be used to generate a force eld for the manipulation of small, at objects. Calculations and experiments show tha...

We present a miniaturized Fourier transform spectrometer (FTS) based on optical microelectromechanical system technology. The FTS is a Michelson interferometer with one scanning mirror. A new type of electrostatic comb drive actuator moves the mirror. We have measured a nonlinearity of the driving system of +/-0.5 mum for a displacement of 38.5 mum . A method is presented to correct the spectru...