A nano-displacement sensing method for micro-opto-electro-mechanical-systems (MOEMS) is proposed. The method is based on a square attice photonic crystal (PC) made of dielectric silicon posts, mounted on a micro mechanical flexure. The flexure is fixed at one end and is free to ove at the other, to enable elastic deformations that, by being transferred to the photonic crystal array, modify its ...

-Barometer is a well-organized tool for determining atmospheric pressure. The altimeter is a tool which calculates the vertical distance in accordance with a reference level. The barometric altimeter, computes the altitude according to the atmospheric pressure. Accuracy and size are the major issues in altimetry. On the other hand the present day altimeters employing conventional pressure senso...

The frequency oscillator is a basic component found in many electrical, electronic, and communications circuits systems. Oscillators come variety of shapes sizes, depending on the range employed given application. Some applications need oscillators that generate low frequencies other extremely high frequencies. As result expansion speed modern technologies, new appeared operating at Most wirele...

Electrodeposition is a very important technology in the fabrication of micro-compo‐ nents for micro-electro-mechanical systems (MEMS) or integrated circuits. Evalua‐ tions of the materials used in these devices as 3D components should be conducted using micro-sized specimens due to the sample size effect on the practical use of the components. Nanocrystalline metals could be deposited using an ...

This study analyzes the chaotic behavior of a micromechanical resonator with electrostatic forces on both sides and investigates the control of chaos. A phase portrait, maximum Lyapunov exponent and bifurcation diagram are used to find the chaotic dynamics of this micro-electro-mechanical system (MEMS). To suppress chaotic motion, a robust fuzzy sliding mode controller (FSMC) is designed to tur...

We present in this paper the development of a high-resolution projection micro-stereolithography (P SL) process by using the Digital Micromirror Device (DMDTM, Texas Instruments) as a dynamic mask. This unique technology provides a parallel fabrication of complex three-dimensional (3D) microstructures used for micro electro-mechanical systems (MEMS). Based on the understanding of underlying mec...

This work presents a novel method based on the micromachined acoustic wave sensor for evaluating silicon membrane thickness. Like pressure sensors, accelerometers, micro flow sensors and micropumps, many micro-electro-mechanical systems (MEMS) devices require that silicon membrane thickness be known exactly. Precisely controlling silicon membrane thickness during wet etching is important, becau...

The purpose of this study is a discussion on the multifaceted utilization indoor positioning systems such as building facility control, use situation grasping, and operational analysis in offices. Thermopile human sensors have been come into practical by MEMS (Micro Electro Mechanical Systems) technology are becoming widespread. In report, accuracy presence / absence count detection for thermop...

Micro-electro-mechanical-systems (MEMS) have seen a very steep progression in R&D in the 1980s and 1990s, both in academia and industry. The rapid growth has been enabled by new fabrication methods derived from semiconductor integrated circuit manufacturing. These are basically lithography, thin film deposition dry and wet etching, which were tailored for MEMS purposes, since MEMS often uses si...

Temperature, voltage and fuel flow distribution all contribute considerably to fuel cell performance. Conventional methods cannot accurately determine parameter changes inside a fuel cell. This investigation developed flexible and multi-functional micro sensors on a 40 μm-thick stainless steel foil substrate by using micro-electro-mechanical systems (MEMS) and embedded them in a proton exchange...