This paper presents the results of a comprehensive study pull-in phenomenon in hybrid levitation microactuator (HLMA), which square-shaped proof masses (PMs) different sizes, namely, length sides 2.8 and 3.2 mm thicknesses 25 10 μm were electromagnetically levitated. The actuation PMs was performed by electrostatic force generated set energized electrodes acting on bottom surface along vertical...

A parameterized model for the impact dynamics of a piezoelectric microactuator is proposed, and a system-identification procedure for quantifying model parameters is presented. The proposed model incorporates squeeze-film damping, adhesion and coefficient-of-restitution effects. Following parameter quantification from sample data of bouncing impacts and progressive ramped-square-wave inputs, th...

We have micromachined and tested the first paraffin–PDMS composite thermal microactuator having multi shot large vertical displacement capabilities (~160 μm for 1 mm diameter device). A solid to liquid phase change of trapped paraffin into the PDMS is used to create a large volume dilatation of the composite (18%, for a temperature varied from 20 to 80 °C). The elasticity of the PDMS ensures th...

This paper presents a new yet simple family of microactuators that provide both large displacements ( m) and high forces ( N) hence suitable for microvalves. The actuators use the high volumetric expansion of a sealed, surface micromachined patch of paraffin heated near its melting point to deform a sealing diaphragm. Two types of actuators were fabricated using a simple 2-mask process. The fir...

The piezoelectric properties of lead zirconate titanate (PZT) thin films deposited on thick silicon substrates and thin silicon membranes were investigated using optical interferometry. The effect of the geometrical constraints and clamping effects on the piezoelectric response is discussed. The study of the dielectric permittivity and the loss as a function of the amplitude of the alternating ...

In this paper we present the world’s first micropump entirely fabricated using a 3D direct manufacture process based on microstereolithography. The device employs a single pneumatically actuated membrane, with flow rectification provided by a nozzle/diffuser arrangement. A maximum flow rate of just over 2,000 μl/min was achieved with a pneumatic pressure of 2 PSIG and a stroke rate of 96 Hz. Th...

Thermoresponsive hydrogels such as poly(N-isopropylacrylamide) (pNIPAM) are highly interesting materials for generating soft actuator systems. Whereas the material has so far mostly been used in macroscopic systems, here it is demonstrated that pNIPAM an excellent systems at micrometer scale. Two-photon direct laser writing to precisely structure thermoresponsive scale based on a photosensitive...