The miniaturization of electromechanical transducers using bulk and surface micromachining processes has enabled the deployment of microelectromechanical systems (MEMS) in a variety of applications, from cell phones and ink-jet printers to drug delivery devices. A recently developed approach for the fabrication of multimaterial fiber devices presents a unique opportunity to realize MEMS in a no...

The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desire...

This paper presents the first implantable, unpowered, parylene-based microelectromechanical system (MEMS) pressure sensor for intraocular pressure (IOP) sensing. From in situ mechanical deformation of the compliant spiral-tube structures, this sensor registers pressure variations without electrical or powered signal transduction of any kind. Micromachined high-aspect-ratio polymeric hollow tube...

Reducing access times to secondary I/O devices has long been the focus of many systems researchers. With traditional disk drives, access time is the composition of transfer time, seek time and rotational latency, so many techniques as to minimize these factors, such as ordering I/O requests or intelligently placing data, have been developed. MEMS-based storage devices are seen by many as a repl...

A custom designed microelectromechanical systems (MEMS) micro-hotplate, capable of operating at high temperatures (up to 700 °C), was used to thermo-optically characterize fluorescent temperature-sensitive nanosensors. The nanosensors, 550 nm in diameter, are composed of temperature-sensitive rhodamine B (RhB) fluorophore which was conjugated to an inert silica sol-gel matrix. Temperature-sensi...

In this paper, we investigate the stochastic effects of the microstructure of polysilicon films on the overall response of microelectromechanical systems (MEMS). A device for on-chip testing has been purposely designed so as to maximize, in compliance with the production process, its sensitivity to fluctuations of the microstructural properties; as a side effect, its sensitivity to geometrical ...

Introduction: In the US, about 60,000 victims of traumatic brain injury (TBI) survive long enough to reach the emergency department (ED). Approximately half of these (30,000) will require careful monitoring of intracranial hypertension [1]. Besides the intracranial pressure (ICP) measurements of TBI patients in the ED, continuous ICP measurements are sometimes essential in terms of managing a p...

Abstract Purpose To monitor the progression of diseases such as Parkinson’s disease (PD) or essential tremor (ET), there is a growing interest in understanding their side effects and continuously monitoring deterioration progress patients’ health conditions. The objective this study was to investigate feasibility wearable device constructed from compact MEMS for robust detection upper limb usin...