نتایج جستجو برای: oxynitride thin films

تعداد نتایج: 181302  

Journal: :Physica Status Solidi B-basic Solid State Physics 2021

Lithium phosphorus sulfuric oxide nitride (LiPSON) prepared by radio frequency sputtering is investigated as a transparent solid lithium-ion conductor for use in all-solid-state electrochromic (EC) devices. The LiPSON layers are characterized X-ray photoelectron spectroscopy (XPS) and their electrical characteristics studied temperature-dependent impedance spectroscopy. Half-cells of deposited ...

2016
Wonjun Lee Woojin Kang Asif Khan Zafar Abas Heung Soo Kim Il-Kwon Oh

Piezoelectric thin films offer a number of advantages in various applications, such as high energy density harvesters, a wide dynamic range, and high sensitivity sensors, as well as large displacement and low power consumption actuators. This review covers the available material forms and applications of piezoelectric thin films: lead zirconate titanate (PZT)-based thin films, lead-free piezoel...

Journal: :Microelectronics Reliability 2012
Robert Mroczynski Romuald B. Beck

In this study, we present selected reliability issues of double gate dielectric stacks for non-volatile semiconductor memory (NVSM) applications. Fabricated gate structures were consisted of PECVD silicon oxynitride layer (SiOxNy) as the pedestal layer and hafnium dioxide layer (HfO2) as the top gate dielectric. In the course of this work, obtained MIS structures were investigated by means of c...

Journal: :Journal of Applied Electrochemistry 2021

Titanium oxynitride films were deposited onto commercially pure titanium substrates by direct current reactive magnetron sputtering method using Ti targets and an Ar–N2–O2 mixture discharge gas. The X-ray photoelectron spectroscopy survey spectra on the etched surfaces of TiON exhibited characteristic 2p, N 1s, O 1s peaks at corresponding binding energies 454.5, 397.0, 530.7 eV, respectively. s...

صالحی, سیدمحمدعلی, میرجلیلی, غضنفر, جلیل پیران, علی,

CdS thin films were deposited by thermal evaporation in a vacuum of ~ 10-5 torr at room temperature. Samples were subjected to annealing in the range of temperatures 100-300 oC for 1 hour in air.The crystal structure of CdS films was characterized by XRD technique. Only hexagonal phase with the preferred (002) plane was found in CdS films

Nanostructured TiO2 and S and Fe co-doped TiO2 thin films with high transparency were prepared on glass substrate through ultrasonic-assisted spray pyrolysis technique. The effects of doping on morphological, optical an...

Nanocrystalline PbS thin films are deposited on glass and alumina substratesthrough the chemical bath deposition technique by creating similar conditions, in orderto investigate the effects of the substrate. The structural and optical properties of PbSfilms are investigated by X-ray diffraction, scanning electron microscope, and UV–Vis.The structural analyses of the films indicate that they are...

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