نتایج جستجو برای: pecvd reactor
تعداد نتایج: 30231 فیلتر نتایج به سال:
Firsts results on particle detection using a novel silicon pixel detector are presented. The sensor consists of an array of 48 squar pixels with 380 lm pitch based on a n–i–p hydrogenated amorphous silicon (a-Si:H) film deposited on top of a VLSI chip. Th deposition was performed by VHF-PECVD, which enables high rate deposition up to 2 nm/s. Direct particle detection using bet particles from Ni...
Techniques for cost-efficient operation of SiNx:H systems with a capability for hydrogen passivation in a manufacturing environment are analyzed. We conclude that SiNx:H performance may be optimized by a variety of techniques, and that the cost and productivity of the deposition tool may be the determining factors in the industry’s decision for a particular technique. PECVD constitutes the curr...
Due to its outstanding chemical stability and mechanical properties, silicon carbide (SiC) is one of the best materials for harsh environment applications. In this work, bulk micromachining technique was utilized to fabricate a PECVD SiC pressure sensor. This technique simplified the process and solved the stickiness problem in surface micromachining. The whole fabrication temperature is under ...
1. Definition of Catalytic Properties 1.1. Conversion 1.2. Selectivity 1.3. Yield 1.4. Catalyst Deactivation and Sustainability 2. Reactor Types 2.1. Batch Reactor 2.2. Perfectly Mixed Flow Reactor 2.3. Plug Flow Reactor 3. Intrinsic Kinetics 3.1. External Mass and Heat Transport Limitations 3.2. Internal Mass and Heat Transport Limitations 3.3. Flow Pattern Ideality 4. Specific Reactor Types 4...
A memristor is a new generation memory that merges dynamic random access and flash properties. In addition, it can be used in neuromorphic electronics. The advantage of silicon oxynitride, as an active layer, over other dielectrics compatibility with technology. It expected SiNxOy-based memristors will combine the advantages based on nonstoichiometric oxides nitrides. present work, plasma-enhan...
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