نتایج جستجو برای: rf sputtering

تعداد نتایج: 40854  

2017
Kuo-Yung Hung Hong-Chen Lai Hui-Ping Feng

Hydroxyapatite (HA) coatings on titanium have been investigated for many years, and have demonstrated advantageous biocompatibility in dental implants. Animal experiments have demonstrated that the biological response to plasma-sprayed HA-coated implants shows disadvantages in terms of adherence, thickness uniformity, and long-term osseointegration effects. Determining how to resolve the degrad...

1997
N. R. Rueger J. J. Beulens M. Schaepkens M. F. Doemling J. M. Mirza T. E. F. M. Standaert G. S. Oehrlein

It has been found that in the etching of SiO2 using CHF3 in an inductively coupled plasma reactor of the planarized coil design, a thin steady state fluorocarbon film can play an important role in determining the rate of etching. This etching is encountered as the amount of bias power used in the SiO2 etching process is increased, and a transition from fluorocarbon film growth on the SiO2 to an...

2004
H. C. Yao W. T. Wu M. C. Chiu F. S. Shieu

Titanium oxide (TiO2) thin films were deposited by RF magnetron sputtering on Si and glass substrates. The microstructure, surface morphology, and optical properties of the thin films were investigated by grazing incidence X-ray diffraction (GIXD), transmission electron microscopy (TEM), field emission scanning electron microscopy (FE-SEM), atomic force microscopy (AFM), and UV/VIS spectrophoto...

2014
Bo-Ah Lee Hae-Jin Kim Yun-Ze Xuan Yeong-Joon Park Hyun-Ju Chung Young-Joon Kim

PURPOSE The purpose of this study was to assess the surface characteristics and the biocompatibility of zirconium (Zr) coating on Ti-6Al-4V alloy surface by radio frequency (RF) magnetron sputtering method. MATERIALS AND METHODS The zirconium films were developed on Ti-6Al-4V discs using RF magnetron sputtering method. Surface profile, surface composition, surface roughness and surface energy...

Journal: :TEION KOGAKU (Journal of Cryogenics and Superconductivity Society of Japan) 1989

Journal: :Journal of the Korean institute of surface engineering 2015

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