The authors report on the fabrication of 200 nm period blazed transmission gratings on silicon-on-insulator SOI wafers. These critical angle transmission CAT gratings require 3–5 m tall freestanding grating bars with a very high aspect ratio 100 and smooth sidewalls. In order to meet the challenging geometrical requirements, they modified and improved our previously reported process for the fab...

This work presents a new method of fabricating implantable multielectrode arrays on lightly doped single-crystal silicon. Such arrays are essential tools for electrical stimulation and recording of nerve signals. Our new microfabrication process, based on silicon-on-insulator (SOI) technology, inherently has excellent control over the final probe thickness without wet etching. The needle shanks...

This paper reports a microelectromechanical systems (MEMS) resonant varifocal mirror integrated with piezoresistive focus sensor. The varifocal mirror is driven electrostatically at a resonant frequency of a mirror plate to obtain the wide scanning range of a focal length. A piezoresistor is used to monitor the focal length of the varifocal mirror. The device is made of a silicon-on-insulator (...

This study reports the manufacturing of silicon-on-polymer (SOP). It describes transfer a 200 mm diameter silicon thin film from silicon-on-insulator (SOI) substrate to flexible polymer. The thickness single-crystal was less than nm, and achieved by bonding SOI wafer temporary carrier with an adhesive Various parameters were investigated: adherence stack, temperature bonding, carrier, Si thickn...

Focused ion beam (FIB) milling can be used as a tool to fabricate structures with sub-micrometer details. The slab material can be silicon, for example, which can then be used as a mould for nano-imprint lithography, or in silicon on insulator (SOI) layer configuration suitable for photonic applications. In the latter, additional effort has to be taken to prevent high FIB induced losses, due to...

Recently there has been growing interest in sensing by means of optical microring resonators in photonic integrated circuits that are fabricated in silicon-on-insulator (SOI) technology. Taillaert et al. [Proc. SPIE 6619, 661914 (2007)] proposed the use of a silicon-waveguide-based ring resonator as a strain gauge. However, the str...

Enhanced third harmonic (TH) generation from Silicon-On-Insulator (SOI) planar waveguides as well as SOI photonic crystal (PhC) slabs is studied in different angular configurations, both in the visible and infrared energy ranges. In the SOI planar waveguide, the multilayer structure causes the optical properties such as TH reflection to be different from those of bulk silicon samples. This beha...

We demonstrate a reverse design method for realizing a broad range of optical filters based on integrated optical waveguides and experimentally verify example designs on a CMOS-compatible silicon-on-insulator (SOI) platform. The reflectance-based filters allow for control of both phase and amplitude of the optical response. Among this device's many potential applications we highlight and numeri...

Liquid Crystals have many applications in photonics, but often the geometrical properties of the photonic structures give problems for controlling the alignment of the liquid crystal. We demonstrate the effect on the orientation of a nematic liquid crystal by structures etched in Silicon-on-Insulator (SOI) wafers, produced by photolithography. We characterize the alignment effect of several pat...

Variable power splitting ratio 2x2 MMI couplers using multimode waveguide holograms are analyzed. Theoretical analysis shows that variable splitting ratios can be obtained with surface relief holograms on MMI couplers with fixed dimensions. Devices with paired-imaging lengths are designed on a silicon-on-insulator (SOI) platform. Beam propagation simulations are used to verify a matrix theory a...