نتایج جستجو برای: thermal chemical vapor deposition

تعداد نتایج: 673952  

2015
Christopher A. Bower Kristin H. Gilchrist Jeffrey R. Piascik Brian R. Stoner Srividya Natarajan Charles B. Parker Scott D. Wolter Jeffrey T. Glass

Articles you may be interested in Fabrication and characterization of single carbon nanotube emitters as point electron sources Appl. Source brightness and useful beam current of carbon nanotubes and other very small emitters Carbon nanotubes synthesized by biased thermal chemical vapor deposition as an electron source in an x-ray tube Appl. On-chip vacuum microtriode using carbon nanotube fiel...

2014
Arun S. Kousalya Justin A. Weibel Suresh V. Garimella Timothy S. Fisher

Phase change cooling schemes involving passive heat spreading devices, such as heat pipes and vapor chambers, are widely adopted for thermal management of high heat-flux technologies. In this study, carbon nanotubes (CNTs) are fabricated on a 200 lm thick sintered copper powder wick layer using microwave plasma enhanced chemical vapor deposition technique. A physical vapor deposition process is...

Journal: :IEEE Trans. on CAD of Integrated Circuits and Systems 1999
Wolfgang Pyka Peter Fleischmann Bernhard Haindl Siegfried Selberherr

For wafer sizes in state-of-the-art semiconductor manufacturing ranging up to 300 mm, the uniformity of processes across the wafer becomes a very important issue. We present a fully three-dimensional model for the feature scale simulation of continuum transport and reaction determined high-pressure chemical vapor deposition processes suitable for the investigation of such nonuniformities. The n...

2009
R. I. Badran F. S. Al-Hazmi S. Al-Heniti A. A. Al-Ghamdi J. Li S. Xiong

Two sets of hydrogenated microcrystalline silicon thin-film samples were prepared by Plasma Enhanced Chemical Vapor Deposition (PECVD) technique at different deposition conditions of excited power and pressure. The correlation between the crystalline volume fraction for the samples determined from Raman spectra and the excited power, pressure, absorption coefficient, refractive index and optica...

1998
A. P. Burden S. R. P. Silva

The simultaneous generation of dust during the deposition of semiconducting thin films by radio frequency plasma enhanced chemical vapor deposition has so far been regarded as a troublesome by-product. However, we present results from recent microstructural investigations of carbonaceous dust particles from a methane precursor that demonstrate that the technique may be suited to generating full...

Journal: :The Review of scientific instruments 2007
Lucas van Laake Anastasios John Hart Alexander H Slocum

Rapid continuous thermal control of chemical reactions such as those for chemical vapor deposition (CVD) growth of nanotubes and nanowires cannot be studied using traditional reactors such as tube furnaces, which have large thermal masses. We present the design, modeling, and verification of a simple, low-cost reactor based on resistive heating of a suspended silicon platform. This system achie...

2002
Jed Brody

Reducing solar cell thickness is an attractive way to reduce material costs. However, model calculations in this paper show that if rear surface recombination velocity (S) is greater than about 1000 cm/s, a 100-μm-thick screen-printed cell on solar-grade material has a lower efficiency than a 300-μm-thick cell. The literature demonstrates that S < 1000 cm/s is readily achievable on monocrystall...

2014
Fan Ren Kar Wei Ng Kun Li Hao Sun Connie J. Chang-Hasnain

Articles you may be interested in High-quality 1.3 m-wavelength GaInAsN/GaAs quantum wells grown by metalorganic vapor phase epitaxy on vicinal substrates Appl. Relaxed, high-quality InP on GaAs by using InGaAs and InGaP graded buffers to avoid phase separation High-detectivity InAs quantum-dot infrared photodetectors grown on InP by metal–organic chemical–vapor deposition Appl. High detectivit...

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