Half-metallic Co 2 FeAl Heusler alloy thin films with various thickness were prepared by MBE method and its magnetic crystalline properties investigated. At the of 20 nm above, good high B2-order parameter was obtained. In addition, damping constant evaluated from peak-to-peak linewidth measured FMR ultra-low below 0.001 obtained at film 30 nm. These results are thanks to excellent half-metalli...