This paper describes design, fabrication, and characterization of microhotplates based on microcantilevers. Six different hotplate cantilever esigns are proposed to investigate heating response time and temperature uniformity. Devices were fabricated and their electrical, thermal, and echanical characteristics were measured. The cantilevers have electrical resistance in the 1 k range, consume 1...

Inductively coupled plasma source operating at low pressure to improve uniform and high plasma density is widely employed for microelectronic device fabrication. As the size of the inductively coupled source increases, it has the problems related to the electrical characteristic and non-uniformity. To improve the non-uniformity, the roles of the parallel resonance antenna are presented. The two...

In this paper we consider the problem of proving lower bounds for the permanent. An ongoing line of research has shown super-polynomial lower bounds for slightly-non-uniform small-depth threshold and arithmetic circuits [All99, KP09, JS11, JS12]. We prove a new parameterized lower bound that includes each of the previous results as sub-cases. Our main result implies that the permanent does not ...

The Halton sequence is one of the classical low-discrepancy sequences. It is effectively used in numerical integration when the dimension is small, however, for larger dimensions, the uniformity of the sequence quickly degrades. As a remedy, generalized (scrambled) Halton sequences have been introduced by several researchers since the 1970s. In a generalized Halton sequence, the digits of the o...

We developed a class of quasi-3D plasmonic crystal that consists of multilayered, regular arrays of subwavelength metal nanostructures. The complex, highly sensitive structure of the optical transmission spectra of these crystals makes them especially well suited for sensing applications. Coupled with quantitative electrodynamics modeling of their optical response, they enable full multiwavelen...

We propose a new graph based strategy for the detection of spatial clusters of arbitrary geometric form in a map of geo-referenced populations and cases. Our test statistic is based on the likelihood ratio test previously formulated by Kulldorff and Nagarwalla for circular clusters. A new technique of adaptive simulated annealing is developed, focused on the problem of finding the local maxima ...

An H1Galerkin mixed finite element method is discussed for a class of second order hyperbolic problems. It is proved that the Galerkin approximations have the same rates of convergence as in the classical mixed method, but without LBB stability condition and quasi-uniformity requirement on the finite element mesh. Compared to the results proved for one space variable, the L∞(L2)-estimate of the...

The Optoelectronic Technology Consortium (OETC) 16 Gbit/s, 32-channel parallel fiber optic bus introduces new requirements for modeling and simulation of an optical bus which were not present for previous single-channel optical link systems. These requirements include the simulation of the statistical variation in component parameters, timing skew, and crosstalk. Due to the required simulation ...

Achieving homogeneous phase transition and uniform charge distribution is essential for good cycle stability and high capacity when phase conversion materials are used as electrodes. Herein, we show that chemical lithiation of bulk 2H-MoS2 distorts its crystalline domains in three primary directions to produce mosaic-like 1T' nanocrystalline domains, which improve phase and charge uniformity du...