A series of thermoelectric responsive shape memory hydro-epoxy (H-EP) composites filled with different contents of graphene were developed and characterized. Compared with traditional actuation materials, these novel shape memory composites exhibit attractive properties, such as light weight, large deformation, good processability and high response speed, making them good candidates for actuato...

This paper presents the theoretical design and analysis of a tunable Fabry–Perot resonant microcavity filter realized by movable-waveguide-based integrated optical MEMS technology in InP. Wide-bandwidth, high-reflectivity horizontal InP/air-gap distributed bragg reflector (DBR) mirrors monolithically integrated with the waveguides have been proposed. The filter can be tuned by moving one of the...

The past 10 years has witnessed a renewed interest in cellulose research and application, sparked mostly by technological interests in renewable raw materials and more environmentally friendly and sustainable resources. In this paper, we further expand the current knowledge in cellulose applications and technologies by reporting our discovery of cellulose as a smart material that can be used fo...

This paper presents an effective method of linearizing the electrostatic transfer characteristics of micromachined two–dimensional (2-D) scanners. The orthogonal scan angles of surface micromachined polysilicon scanner are controlled by using quadrant electrodes for electrostatic actuation. By using a pair of differential voltages over a bias voltage, we could improve the distortion of projecte...

Dielectric elastomer actuator (DEA) micro- and nano-structures are referred to artificial muscles because of their specific continuous power and adequate time response. The bending measurement of an asymmetric, planar DEA is described. The asymmetric cantilevers consist of 1 or 5 μm-thin DEAs deposited on polyethylene naphthalate (PEN) substrates 16, 25, 38, or 50 μm thick. The application of a...

MEMS micro-T-switches actuated via electrochemical bubbles for cell sorting applications in a monolithic chip level are proposed and successfully demonstrated. The electrolysis-bubble actuator, which has the features of low operation temperature and high surface-tension force, is developed to actuate the micro-T-switch sorting structure in our device. The double T-structure design, the T-shape ...

An experimental and theoretical electromechanical characterization of beam-like, uniform cross-section, unimorph structures employing single crystal piezoelectrics is presented. The purpose of the research is to understand and compare the actuation capabilities of several piezoelectric materials and substrate configurations so that optimal design choices can be employed in lightweight, low powe...

Soft robotics may provide many advantages compared to traditional robotics approaches based on rigid materials, such as intrinsically safe physical human-robot interaction, efficient/stable locomotion, adaptive morphology, etc. The objective of this study is to develop a compliant structural actuator for soft a soft robot using dielectric elastomer minimum energy structures (DEMES). DEMES consi...

Assembled MEMS structures provide a unique design opportunity by overcoming the inherent planarity of MEMS devices, allowing for added flexibility and new application areas. However, external assembly of these devices is frequently problematic. Force and displacement controls are often imprecise at the microscale resulting in damage to the device. In contrast, self-assembling MEMS structures ca...