A rocking mass gyroscope (RMG) is a kind of vibrating mass gyroscope with high sensitivity, whose driving mode and sensing mode are completely uniform. MEMS RMG devices are a research hotspot now because they have the potential to be used in space applications. Support loss is the dominant energy loss mechanism influencing their high sensitivity. An accurate analytical model of support loss for...

Bent and folded beam configurations have been popularly used in electrothermoelastic (E-T) actuation. This paper introduces new designs of thermal end-effector with micro-grasping and micro-heating capabilities. We obtained analytical models for all possible steady state temperature responses of suspended and overhanging microstructures that constitute bent beam, folded beam, and combined actua...

Micromachined gyroscopes are probably the most challenging type of transducers ever attempted to be designed in micro-world. A nail-size dynamic system integrated with control electronics on the same silicon chip (Fig. 1(a)) is designed to be a very sensitive sensor which is potentially able to detect maneuvers and motions beyond human perception. Along with exciting opportunities which MEMS gy...

The recent results include formation and measurement of the micro bunch structures of the different time scales. Double beam structure produced and characterized at 100 fs – 0.5 ps range using beam splitting during compression in the magnetic chicane – “dog leg” arrangement. Arbitrary number of 10-50 femtoseconds micro bunches are sliced out of 5 ps long beam using wire mesh. CSR interferometer...

In this paper, an adaptive double feedback fuzzy neural fractional order sliding control approach is presented to solve the problem that lumped parameter uncertainties cannot be measured and parameters are unknown in a micro gyroscope system. Firstly, surface designed, terms can provide additional freedom improve accuracy. Then, upper bound of nonlinearities estimated online using network. Acco...