The extreme precision requirements in semiconductor manufacturing drive the need for an active vibration isolation system in a laser pattern generator. Optimizing the controller would not only improve isolation performance, but could also reduce the cost of ownership by extending lifetime of consumables and stretch service intervals. The optimization has been performed and evaluated in a model ...

In this paper we present a solution to the decoupling problem with stability of linear multivariable systems with 2 outputs, using nonregular static state feedback. The problem is tackled using an algebraic-polynomial approach, and the main idea is to test the con­ ditions for a decoupling compensator with stability to be feedback realizable. It is shown that the problem has a solution if and o...

The application of dynamical decoupling pulses to a single qubit interacting with a linear harmonic oscillator bath with 1/f ~more generally, strong low-frequency! spectral density is studied, and compared to the Ohmic case. Decoupling pulses that are slower than the fastest bath time scale are shown to drastically reduce the decoherence rate in the 1/f case. Contrary to conclusions drawn from ...

A method based on the algorithmization of the geometric approach, using the equivalence between the maximal unobservable subspaces and the maximal (A, B)-invariant subspaces is proposed in order to solve the problem of group decoupling for linear multivariable systems. Necessary and sufficient conditions for compatibility of the maximal controllability subspaces are transformed to the necessary...