نتایج جستجو برای: electro mechanical systems mems

تعداد نتایج: 1410598  

2016
Mehmet C. Tarhan Nicolas Lafitte Yannick Tauran Laurent Jalabert Momoko Kumemura Grégoire Perret Beomjoon Kim Anthony W. Coleman Hiroyuki Fujita Dominique Collard

Monitoring biological reactions using the mechanical response of macromolecules is an alternative approach to immunoassays for providing real-time information about the underlying molecular mechanisms. Although force spectroscopy techniques, e.g. AFM and optical tweezers, perform precise molecular measurements at the single molecule level, sophisticated operation prevent their intensive use for...

This paper proposes a Micro-electro-mechanical (MEMS) capacitive pressure sensor that relies on the movable electrode displaced like a flat plate equal to the maximum center deflection of diaphragm. The diaphragm, movable electrode and mechanical coupling are made of polysilicon, gold and Si3N4, respectively. The fixed electrode is gold and the substrate is Pyrex glass. This proposed method inc...

Journal: :Communications in Nonlinear Science and Numerical Simulation 2022

The paper introduces predictive modeling of generic memcapacitors using multi-port versions fundamental elements Chua’s table. Generic are the most common type memcapacitive systems; they behave as state-dependent capacitors, with capacitance being independent voltage and charge. model consists a multiport capacitor an associated dynamic system that represents state dynamics. It is shown potent...

2011
E. Manikandan K. A. Karthigeyan

-Barometer is a well-organized tool for determining atmospheric pressure. The altimeter is a tool which calculates the vertical distance in accordance with a reference level. The barometric altimeter, computes the altitude according to the atmospheric pressure. Accuracy and size are the major issues in altimetry. On the other hand the present day altimeters employing conventional pressure senso...

2016
Hoang-Phuong Phan Toan Dinh Takahiro Kozeki Afzaal Qamar Takahiro Namazu Sima Dimitrijev Nam-Trung Nguyen Dzung Viet Dao

Cubic silicon carbide is a promising material for Micro Electro Mechanical Systems (MEMS) applications in harsh environ-ments and bioapplications thanks to its large band gap, chemical inertness, excellent corrosion tolerance and capability of growth on a Si substrate. This paper reports the piezoresistive effect of p-type single crystalline 3C-SiC characterized at high temperatures, using an i...

Journal: :Medicine in novel technology and devices 2022

Mechanical stimulation has been imposed on living cells using several approaches. Most early investigations were conducted groups of cells, utilizing techniques such as substrate deformation and flow-induced shear. To investigate the properties individually, many conventional utilized, AFM, optical traps/optical tweezers, magnetic beads, micropipette aspiration. In specific mechanical interroga...

Journal: :Microelectronics Reliability 2007
Zhanwei Liu Huimin Xie Daining Fang Changzhi Gu Yonggang Meng Weining Wang Yan Fang Jianmin Miao

The mechanical behaviors of microstructures and micro-devices have drawn the attention from researchers on materials and mechanics in recent years. To understand the rule of these behaviors, the deformation measurement techniques with micro/nanometer sensitivity and spatial resolution are required. In this paper, a micro-marker identification method is developed to measure microstructure deform...

2012
Bin Tang Kazuo Sato

In the area of Micro Electro Mechanical Systems (MEMS), bulk micromachining and surface micromachining are two main technologies. Bulk micromachining defines structures by selectively etching inside a substrate while surface micromachining uses a succession of thin film deposition and selective etching on top of a substrate. The two technologies are quite different, resulting in different dimen...

Journal: :Iet Control Theory and Applications 2023

This paper proposes an adaptive observer-based scheme to control fractional-order chaotic micro-electro-mechanical-systems (MEMS). The model of a system exhibits the dynamic behaviour physical more accurately than similar integer-order one. An considering unknown parameters is presented for micro-electro-mechanical-system. To handle existence parameters, law consists both estimated and also sta...

2014
Sandeep O S R Padmanabhan

Growing need for a variety of micro electro-mechanical systems necessitates advances in manufacturing technologies for high volume production at low cost. In this study, a mechanical micro pump actuator will be modelled using MEMS module of COMSOL simulation tool. The micro pump actuator will be based on bimetallic actuation which in-turn is based on the difference in the thermal expansion coef...

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