In this paper, we present three hierarchical multiscale architectures that are interconnected electrooptically at micro-scale level and via spin waves at nanoscale level. These architectures are derived from the Optical Reconfigurable Mesh (ORM), which is a MEMS architecture that supports several types of electrical and optical routings. The first multi-scale architecture presented here is a st...

Catalytic combustion is a promising technique for producing thermal energy in MEMS(Micro Electro-Mechanical Systems) scale electrical power generators. To examine the feasibility and possible benefits of catalytic combustion in MEMS-scale channels, catalytic reactions in small diameter (1 mm) flow reactor tubes at low Reynolds numbers are simulated by using the commercial fluid dynamics code FL...

In MEMS capacitive microphone design, it is very critical to get highest yielding rate and sensitivity as the two major factors dominate structure design of microphone. The centralpost MEMS microphone is introduced in this paper to differentiate from traditional fixed membrane boundary microphone since the construction is simple and only few masks are required in the process so that the yieldin...

Many types of micro-electro-mechanical-system (MEMS) based products are currently employed in a variety of applications. However, high friction in these systems is a problem which limits the development of MEMS devices in which sliding contacts are involved. The aim of this research is to evaluate the effect of boundary slip on the hydrodynamic friction in a low load lubricated MEMS, in particu...

Micro-Electro-Mechanical System (MEMS) is one of the few commercial platforms for building optical switches. 2D MEMS L-switching matrix has been introduced recently to double the sizes of 2D MEMS crossbar switches. The sizes of switches are mainly limited by the Gaussian signal loss associated path difference. Though the design of L-switching matrix improves system scalability but it suffers in...

In silicon surface micromachining, anhydrous HF GPE process was verified as a very effective method for the dry release of microstructures. The developed gas-phase etching (GPE) process with anhydrous hydrogen fluoride (HF) gas and alcoholic vapor such as methanol, isopropyl alcohol (IPA) was characterized and its selective etching properties were discussed. The structural layers are P-doped mu...

This paper signifies a very basic design and simulation techniques of RF MEMS switches using the advanced design systems software tool (ADS).Micro electro mechanical systems are recent development technologies which has better characteristics performance and also operating at microwave range of frequencies. Fundamentally MEMS switches can be categorized into two types series switches (ohmic typ...

In this paper, a robust PID control scheme is proposed for Micro-Electro-Mechanical-Systems (MEMS) optical switches. The proposed approach is designed in a way which solves two challenging and important problems. The first one is successful reference tracking and the second is mitigating the system nonlinearities. The overall system composed of nonlinear MEMS dynamics and the PID controller is ...

In the last few years several types of MEMS-based spectrometer systems emerged, mainly addressing the NIR spectral range. The presented MEMS-based sensor prototype operates in the mid-IR range between 2200 cm and 2500 cm. The main element is a blazed micro-electro-mechanical reflective grating device with an aperture of 3x3 mm2. The optical setup of the sensor corresponds to a Czerny-Turner typ...

By combining substrate-free structures with anodic bonding technology, we present a simple and efficient micro-electro-mechanical system (MEMS) thermal shear stress sensor. Significantly, the resulting depth of the vacuum cavity of the sensor is determined by the thickness of silicon substrate at which Si is removed by anisotropic wet etching process. Compared with the sensor based on a sacrifi...