We developed a fabrication technique of anti-reflective structures for applications in the visible spectral range. The depth and duty cycle of the grating structures optimised for wavelengths around 500 nm were calculated using rigorous diffraction theory. We used electron-beam lithography for the manufacturing of linear and crossed grating patterns with pitches of 200 nm and various duty cycle...

In this paper, we present a modified nanosphere lithographic scheme that is based on the self-assembly and electroforming techniques. The scheme was demonstrated to fabricate a nickel template of ordered nanobowl arrays together with a nickel nanostructure array-patterned glass substrate. The hemispherical nanobowls exhibit uniform sizes and smooth interior surfaces, and the shallow nanobowls w...

This paper reports a novel actuating design that uses the shear deformation of a piezoelectric actuator to deflect a bulge-diaphragm for driving an array microdroplet ejector. In essence, we employed a circular-shaped actuator poled radial direction with remnant polarization normal to the actuating electric field for inducing the piezoelectric shear effect. The array microdroplet ejector consis...