Physical vapor deposition (PVD) using ionized metal plasmas (ionized PVD or IPVD) is widely used to deposit conducting diffusion barriers and liners such as Ta and TaN for use in ultra-large-scale integrated (ULSI) interconnect stacks. Ionized PVD films exhibit the low resistivity, high density, and good adhesion to underlying dielectric desired for this application. On the other hand, extendin...

Chemical species in plasma are crucial for understanding the mechanism of cubic boron nitride film vapor phase deposition and controlling the film structure. In this study, the plasma condition for cubic boron nitride deposition by low-pressure inductively coupled plasmaenhanced chemical vapor deposition using B2H6, N2, and Ar as reactant gases has been diagnosed by a quadrupole mass spectromet...

We present the results of the stellar and ionized gas kinematics of 13 bright peculiar Virgo cluster galaxies. The stellar velocity field are mostly consistent with a rotation pattern, but some of them shows interesting features such as; Sshaped stellar isovelocity contours in NGC 4064, and signatures of kinematical distinct components in NGC 4429, and NGC 4698. This latter galaxy and NGC 4424 ...

We present Far Ultraviolet Spectroscopic Explorer (FUSE) observations of the post–asymptotic giant branch star von Zeipel 1128 (l 1⁄4 42=5, b 1⁄4 þ78=7; d 1⁄4 10:2 kpc; z 1⁄4 10:0 kpc; vLSR 1⁄4 140 8 km s 1), located in the globular cluster Messier 3. The FUSE observations cover the wavelength range 905–1187 Å at 20 km s 1 (FWHM) resolution. These data exhibit many photospheric and interstellar...

Beam tracking is the potentially most conformal motion mitigation technique in scanned ion beam therapy. For translational motion, beam tracking has been shown to be feasible precisely [1]. If rotational or even deformable motion is present, dose deposition changes even if beam tracking is applied because beam tracking adapts the Bragg peak position only. Dose deposition to other regions, mainl...