Silicon nitride and silicon nitride-based ceramics have several favorable material properties, such as high hardness and good wear resistance, which makes them important materials for the coating industry. This thesis focuses the synthesis of silicon nitride, silicon oxynitride, and silicon carbonitride thin films by reactive magnetron sputtering. The films were characterized based on their che...

We report on the oxidation behavior of AlN/CrN multilayers at 900 °C, deposited by radio frequency magnetron sputtering. It is shown that oxidation in this system is controlled by diffusion of Cr towards the surface and formation of Cr2O3. Cr diffusion is found to mainly occur along grain boundaries. Thus, coherent cubic AlN/CrN multilayer regions with coarse columnar grain structures are found...

by magnetron sputtering W. G. Wang, K. J. Han, K. J. Yee, C. Ni, Q. Wen, H. W. Zhang, Y. Zhang, L. Shah, and John Q. Xiao Department of Physics and Astronomy, University of Delaware, Newark, Delaware 19716, USA Department of Physics, Chungnam National University, Daejeon 305-764, Republic of Korea Department of Materials Sciences, University of Delaware, Newark, Delaware 19716, USA University o...

SiNx and SiCxNy coatings were fabricated with high power impulse magnetron sputtering (HiPIMS). The coatings microstructure, growth pattern, surface morphology, composition, and bonding structure were investigated by AFM, SEM, GIXRD, TEM, EDS as well as XPS, and related to the deposition parameters target powers and substrate temperature. Crosssections of SiCxNy coatings showed either dense and...

Andrejs Petruhins, Arni Sigurdur Ingason, Martin Dahlqvist, Aurelija Mockuté, Muhammad Junaid, Jens Birch, Jun Lu, Lars Hultman, Per O A Persson and Johanna Rosén, Phase stability of Crn+1GaCn MAX phases from first principles and Cr2GaC thin-film synthesis using magnetron sputtering from elemental targets, 2013, Physica Status Solidi. Rapid Research Letters, (7), 11, 971-974. http://dx.doi.org/...