The package and interconnection are critical concerns that influence the reliability of MEMS sensors applied in modern automotive under random vibration conditions. This paper conducts a research on this problem to reveal the reliability and influencing factors of MEMS on board level using finite element modelling and random vibration response simulation method. The ADXL78 MEMS chip is used as ...

Title of Document: AN OPTICAL MEMS SENSOR FOR ON-CHIP CATECHOL DETECTION Peter Hume Dykstra, Master of Science, 2008 Directed By: Professor Reza Ghodssi Department of Electrical and Computer Engineering The Institute for Systems Research This thesis reports the successful design, fabrication and testing of an optical MEMS sensor for the detection of the toxic phenol, catechol. Catechol’s presen...

In this paper, An analytical and simulation solution for touch mode Micro-electromechanical systems (MEMS) capacitive pressure sensor operating in harsh environment is proposed, The principle of the paper is to design, obtain analytical solution and compare the results with the simulation using coventor software for a circular diaphragm deflection before and after touch point. The material is c...

Micro and nano electro mechanical systems (MEMS and NEMS) have emerged as a technology that integrates micro/nano mechanical structures with microelectronics, mainly for sensing and actuation applications. MEMS and NEMS sensor systems that can operate in the presence of high temperatures, corrosive media and/or high radiation will reduce weight, improve machine reliability and reduce cost in st...

The MEMS vector hydrophone is a novel acoustic sensor with a "four-beam-cilia" structure. Based on the MEMS vector hydrophone with this structure, the paper studies the method of estimated direction of arrival (DOA). According to various research papers, many algorithms can be applied to vector hydrophones. The beam-forming approach and bar graph approach are described in detail. Laboratory tes...

This work relates to a novel piezoelectric transformer to be used in an autonomous sensor unit, possibly in conjunction with a RF-MEMS retro-modulator.