This work proposes a novel self-sensing tapping-mode atomic force microscopy operation utilizing charge measurement. A microcantilever coated with a single piezoelectric layer is simultaneously used for actuation and deflection sensing. The cantilever can be batch fabricated with existing micro electro mechanical system processes. The setup enables the omission of the optical beam deflection te...

In this paper, a Micro – Electrical Mechanical System (MEMS) energy harvester is developed, using the phenomenon of Piezoelectricity. Zinc Oxide (ZnO) was chosen as the piezoelectric material. A multi – d31 mode cantilever design was used with varying dimensions of cantilever, to form an array. The individual cantilevers can be either connected in series or parallel to achieve different output ...

In this paper we present a complete methodology for efficient electro-mechanical characterization of a CMOS compatible MEMS technology. Using an original test structure, the so-called “U-shape cantilever beam,” we are able to determine all mechanical characteristics of force sensors constituted with elementary beams in a given technology. A complete set of electro-mechanical relations for the d...

We present a mathematical model for the dynamics of an electrostatically actuated microcantilever. For the common case of cantilevers excited by a periodic voltage, we show that the underlying linearized dynamics are those of a periodic system described by a Mathieu equation. We present experimental results that confirm the validity of the model, and in particular, illustrate that parametric re...

This report describes the development of a low cost, digital Micro Electro Mechanical System (MEMS) vibration meter that reports an approximation to the RMS acceleration of the vibration to which the vibration meter is subjected. The major mechanical element of this vibration meter is a cantilever beam, which is on the order of 500 µm in length, with a piezoresistor deposited at its base. Vibra...

We present a micro-mechanical terahertz (THz) detector fabricated on silicon insulator (SOI) substrate and operating at room-temperature. The device is based U-shaped cantilever of micrometric size, top which two aluminum half-wave dipole antennas are deposited. This produces an absorption extending over the $\sim 2-3.5$THz frequency range. Due to different thermal expansion coefficients alumin...

The most promising method for micro scale energy scavenging is via vibration energy harvesting which converts mechanical energy to electrical energy. Using piezoelectric cantilevers is the most common method for vibration energy harvesting. Changing the shape of the cantilevers can lead to changing the generated output voltage and power. In this work vibration energy harvesting via piezoelectri...

Integration of promising technologies that can enhance sensitivity, selectivity, and throughput into micro total analysis systems (μTAS) are important in making them useful in precise screening of reaction byproducts in analytical chemistry, cellular biology and pharmaceutical industries. But unfortunately so far a method to precisely determine molecular signatures of reagents is missing in μTA...

We report on the demonstration of a high finesse micro-optomechanical system and identify potential applications ranging from optical cooling to weak force detection to massive quantum superpositions. The system consists of a high quality diameter flat dielectric mirror cut from a larger substrate with a focused ion beam and attached to an atomic force microscope cantilever. Cavity ring-down me...