Abstract In this paper, we mainly design two modulation ratios of Al/Ni reactive films, prepare TaN@(Al/Ni) by MEMS (Micro-Electro-Mechanical Systems) technology, and conduct firing experiments using capacitive firing. The experimental results show that the ratio has a large effect on performance bridge action process film can be clearly observed high-speed photography.

This paper signifies a very basic design and simulation techniques of RF MEMS switches using the advanced design systems software tool (ADS).Micro electro mechanical systems are recent development technologies which has better characteristics performance and also operating at microwave range of frequencies. Fundamentally MEMS switches can be categorized into two types series switches (ohmic typ...

The geometrical constraints and dimensional tolerances lead to specific design issues of MEMS manipulators for biological applications. target properties become even more important in the case vitro manipulation cells. Several solutions have been proposed literature, however, some related thermal heating microgripper tips electric voltage effects still remain unsolved. This paper reports additi...

Modeling a MEMS (Micro Electro-Mechanical Systems) electrostatic actuator in electrical domain is important for system simulation of the actuator along with its associated electronics. For instance, an integrated MEMS resonator used in a serial I/O PLL design modeled in electrical domain enables to optimize the system with the rest of the electronics. In this work, we have developed a simplifie...

Micro scale liquid metal droplets have been hailed as the potential key building blocks of future micro-electro-mechanical systems (MEMS). However, most of the current liquid metal enabled systems involve millimeter scale droplets, which are manually injected onto the desired locations of the microchip. Despite its simplicity, this method is impractical for patterning large arrays or complex sy...

The diffusion of micro electro-mechanical systems (MEMS) technology applied to navigation systems is rapidly increasing, but currently, there is a lack of knowledge about the reliability of this typology of devices, representing a serious limitation to their use in aerospace vehicles and other fields with medium and high requirements. In this paper, a reliability testing procedure for inertial ...

In this paper, a robust PID control scheme is proposed for Micro-Electro-Mechanical-Systems (MEMS) optical switches. The proposed approach is designed in a way which solves two challenging and important problems. The first one is successful reference tracking and the second is mitigating the system nonlinearities. The overall system composed of nonlinear MEMS dynamics and the PID controller is ...

Advances in the field of Micro Electro Mechanical Systems (MEMS) and their uses now offer unique opportunities in the design of ultrasensitive analytical tools. The analytical community continues to search for cost-effective, reliable, and even portable analytical techniques that can give reliable and fast response results for a variety of chemicals and biomolecules. Microcantilevers (MCLs) hav...

Determining the interfacial adhesion of ultrathin functional films in micro-electro-mechanical systems (MEMS) and nano-electro-mechanical systems (NEMS) becomes increasingly crucial for optimal design of MEMS/NEMS devices. However, direct measurement of adhesion properties of ultrathin films can be challenging, as the traditional metrology of adhesion at macroscopic scales becomes unsuitable in...

The application of Micro Electro Mechnical Switch (MEMS) technology to Electronically Scanned Arrays (ESAs) provides the potential for significantly reducing the volume, weight, cost, and power consumption of antennas for both radar and communications systems. This paper addresses the current and projected status of Radio Frequency (RF) MEMS technology and assesses the potential benefits of MEM...