Thermal bimorphs are a popular actuation technology in MEMS (Micro-Electro-Mechanical Systems). Their operating principle is based on differential thermal expansion induced by Joule heating. Thermal bimorphs, and other thermal flexture actuators have been used in many applications, from microgrippers, to micro-optical mirrors. In most cases openloop control is used due to difficulties in fabric...

As improvements in fabrication technology for MEMS (micro electro mechanical systems) increase the availability and diversity of these micromachines, engineers are deening a growing number of tasks to which they can be put. The idea of carrying out tasks using coordinated systems of MEMS units motivates the development of automated, algorithmic methods for modeling, designing and controlling th...

For the testing of micro electro-mechanical systems, we propose a taxonomy built-in self-testing methods. These solutions that are non-intrusive, cost-effective and typically non-intrusive during process being actively sought after as cost micro-electro-mechanical systems (MEMS) can account for 50% total end product. The selection methods is analyzed extensively, classification table such prese...

This paper presents an analytical modeling of a piezoelectric multi-layer cantilever used as a micro-electro-mechanical-system (MEMS) chemical sensor. Selectively coated microcantilevers have been developed for highly sensitive chemical sensor applications. The proposed piezoelectric chemical sensor consists of an array of multi-layer piezoelectric cantilevers with voltage output in the millivo...

An integrated system of a microreformer and a carrier allowing for syngas generation from liquefied petroleum gas (LPG) for micro-SOFC application is discussed. The microreformer with an overall size of 12.7 mm × 12.7 mm × 1.9 mm is fabricated with micro-electro-mechanical system (MEMS) technologies. As a catalyst, a special foam-like material made from ceria-zirconia nanoparticles doped with r...

In this paper, the nonlinear squeeze-film damping (SFD) involving rarefied gas effect in micro-electro-mechanical systems (MEMS) is investigated. Considering motion of structures (beam, cantilever, and membrane) MEMS, dynamic response structure affected greatly by SFD. traditional model, a viscous assumption that force linear with moving velocity used. As phenomenon observed for micro-structure...

The field of microfluidics has seen breath-taking progress since its beginnings in the 1980s and early 1990s. While much of the initial work was a by-product of mainstream micro-electro-mechanical systems (MEMS) and silicon based fabrication schemes, soon a specialized research field developed. Over the last decade a strong, highly interdisciplinary microfluidics community emerged with roots in...

Submit Manuscript | http://medcraveonline.com Abbreviations: PMMA: Poly Methyl Methacrylate; HEMA: Hydroxyethyl Methacrylate; FDA: Food and Drug Administration; BCLA: British Contact Lens Association; ACHIEVE: Adolescent and Child Health Initiative to Encourage Vision Empowerment; UDVA: Uncorrected Distance Visual Activity; IOL: Intraocular Lens; IOP: Intraocular Pressure; MEMS: Micro Electro M...

Advances in fuel cell applications reflect the ability of reformers to produce hydrogen. This work presents a flexible micro temperature sensor that is fabricated based on micro-electro-mechanical systems (MEMS) technology and integrated into a flat micro methanol reformer to observe the conditions inside that reformer. The micro temperature sensor has higher accuracy and sensitivity than a con...

This paper reports on the design of a novel ultra low actuation voltage, low loss radio frequency micro-electro-mechanical system (RF MEMS) capacitive shunt switch. The concept of the switch relies on a mechanically unconstrained armature actuated over a coplanar waveguide using electrostatic forces. The minimum actuation voltage of the switch is <2V, with an isolation of 40dB and insertion los...