Form accuracy of a machined component is one of the performance indicators of a machining process. Ultrasonic micromachining is one such process in which the form accuracy of the micromachined component significantly depends upon the form stability of tool. Unlike macromachining, a very small amount of tool wear in micromachining could lead to considerable changes in the form accuracy of the ma...

The mechanical properties of microscopic particles have been a heated research object for it takes the deformation of micro-beads in the microfluidic environment into account. Sufficient knowledge on mechanical properties of micro-beads would lead to better device design and application for cell mechanics, tissue engineering, etc. The physical properties of alginate beads were examined both in ...

This paper reviews recent developments of micro ultrasonic rotary motors using piezoelectric resonant vibrations. Following the historical background, four ultrasonic motors recently developed at Penn State University are introduced; windmill, PZT tube, metal tube, and shear-type motors. Driving principles and motor characteristics are described in comparison with the conventional ultrasonic mo...

A unique micro electrochemical machining (ECM) method based on a scanning micro electrochemical flow cell (SMEFC), in which the electrolyte is confined beneath the tool electrode instead of spreading on the workpiece surface, has been developed and its feasibility for fabricating mesoscale channels has been investigated. The effects of the surface conditions, the applied current, the feed rate,...

The excimer laser machining has been widely applied to micromachining of various materials. An excimer laser dragging process to ablate a groove pattern on a polycarbonate (PC) sheet through a mask opening is analyzed in this paper. Currently, a large number of papers studying the interaction between the laser machining parameters and various materials are presented. However, the prediction of ...

Magnesium based metal matrix composite (Mg/MMC) has been widely used in various area such as aerospace and automobile due to its light weight and better mechanical properties. However the heterogeneous structure and high abrasiveness particles make it to become a difficult-to-cut material especially in micro scale machining, several critical issues in machining process become prominent with the...

In this paper, fuzzy logic integrated with the Taguchi method is used to optimize Wire Electro Discharge Machining (WEDM) process with multiple quality characteristics. Rough machining with EDM gives poor surface finish and has micro cracks and pores. Finish machining gives better surface finish but with very poor machining speed (MRR). Spark gap width is one of the important performance measur...

High-speed circuit boards are created to meet the high-speed signal transmission requirements of 5G communication technology, but non-polar resins, flat glass fibers, and multiple hard fillers used for this purpose have posed new challenges their micro-hole processing. The quality has always been a decisive factor in board performance. Therefore, paper aims at proposing processing method improv...

This study investigated the feasibility of the micro powder blasting technique for the micro fabrication of sensor structures using the Pyrex glass to replace the existing silicon-based acceleration sensor fabrication processes. As the preliminary experiments, the effects of the blasting pressure, the mass flow rate of abrasive and the number of nozzle scanning times on erosion depth of the Pyr...