Abstract Integrated quantum photonics, i.e. the generation, manipulation, and detection of states light in integrated photonic chips, is revolutionizing field information all applications, from communications to computing. Although many different platforms are being currently developed, silicon photonics lithium niobate circuits, none them has shown versatility femtosecond laser micromachining ...

| Sensing systems-on-chip (SSoCs), combining micromachined sensing structures and microelectronic building blocks on a single chip, are reviewed. While single-chip pressure and inertial sensing systems have been commercially available for more than a decade, the recent expansion of SSoC into new application areas, ranging from chemical and biochemical sensing to atomic force microscopy, demonst...

During the last decade laser processing of polymers has become an impoxtant field of applied and fundamental research. One of the most promising proposal, to use laser ablation as dry etching technique in photolithography, has not yet becume an industrial application. Many disadvantages of laser ablation, compared to conventional photolithography, are the result of the use of standard polymers....