In the microfabrication processes, it is necessary to examine the quality of the structures to ensure the whole process runs smoothly. However, the examination process of pattern defects is interrupted during the fabrication of high-aspect-ratio microstructures. The inevitable pattern defects arise from capillary forces which occur during the liquid drying process. In this paper, a new method t...

This paper presents the adaptation of a conventional injection molding process to the mass replication of polymeric microstructures with appropriate mold design and process control. Using wet-etched silicon wafers with microstructures on the surfaces as mold inserts, we have successfully predicted, improved and optimized the replication results. The flow behaviors of polymer melts in micro mold...

We study the influence of the symmetries of competing microstructures on the emergence of different mesoscopic morphologies in the growth by vapor deposition of thin solid films. We show the results of numerical simulations in (1+1) - and (2+1) -dimensional systems including different microstructures, as well as thermally activated surface diffusion in combination with a ballistic algorithm to ...

MnS has been attracting more and more attentions in the fields of lithium ion batteries (LIBs) because of its high energy density and low voltage potential. In this paper, we present a simple method for the preparation of urchin-like γ-MnS microstructures using L-cysteine and MnCl2 · 4H2O as the starting materials. The urchin-like γ-MnS microstructures exhibit excellent cycling stability (823.4...

We demonstrate a practical design and integration of multidirectional tilted UV lithography and microinjection molding for microstructure-based microfluidic devices. The previously reported undercut (or T-profile) problem of photoresist causes the imperfect mirror image duplication of the microstructures to the Ni mold. This issue inevitably leads to the unstable molds in the production of micr...

We present the high-throughput fabrication technology of free-floating 3D microstructures combining fine-tuned grayscale lithography with optofluidic maskless lithography. Our system simultaneously modulated mask pattern in time phase using Digital Micromirror Device (DMD) in order to generate the different level of ultraviolet (UV) dose for photopolymerization, which causes to produce the diff...

We are going to introduce the concept of stochastic 3D modeling of geometrically complex (disordered) microstructures as a tool for virtual materials testing, including applications to battery electrodes as well as to electrodes of fuel cells, and solar cells. Using stochastic 3D models, one can generate a large variety of stochastically simulated micrsotructures with little computational effor...

A flip-chip, batch transfer process for LIthographie, Galvanoformung and Abformung (LIGA) microstructures has been demonstrated by selective electroplating and bonding. Single layer LIGA microstructures with thickness of 200 m are fabricated on a dummy substrate first. They are then batch transferred to an IC substrate by means of bonding via electroplating. After the selective bonding process,...

Superpositions of periodic dot screens are largely used in electronic imaging in the field of color printing. In such superpositions the interaction between the superposed layers may cause new structures to appear which did not exist in any of the original layers: macrostructures (also known as moiré patterns) and microstructures (also known as rosettes). While macrostructures are not always ge...

Langmuir monolayers constitute a powerful platform for self-assembly and organization of amhiphilic molecules. Controlling the structural features of condensed domains formed within Langmuir monolayers, however, is a challenging task. The formation of remarkably diverse condensed microstructures is demonstrated in binary monolayers comprising of a surfactant (octadecylmelamine) and a diacetylen...