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We report epitaxial growth of AlN films with atomically flat surface on nano-patterned sapphire substrates (NPSS) prepared by nano-imprint lithography. The crystalline quality can be greatly improved by using the optimized 1-μm-period NPSS. The X-ray diffraction ω-scan full width at half maximum values for (0002) and (102) reflections are 171 and 205 arcsec, respectively. The optimized NPSS con...

In 2019, finally, extreme ultraviolet (EUV) lithography has been applied to high volume manufacturing (HVM) for preparing advanced semiconductor devices. That was very important year EUV enthusiasts and industry. Because it takes a long time, more than 30 years, study realizing HVM. With recent rapid progress on the source power improvement, development including photoresist materials achieved ...

We demonstrated embossed and intaglio nanopatterning using Nanopipette based on the QTF-AFM (Quartz Tunning Fork-Atomic Force Microscopy) system. Used materials in the patterning system were nanoparticles solution and acetone for delivery solution mica and flat plastic for substrate mica. By realizing the nano-scaled liquid ejection technique with the pulled nanopipette conbined QTF-AFM, variou...

We designed, fabricated and demonstrated a solar-blind deep-UV pass filter, that has a measured optical performance of a 27% transmission peak at 290 nm, a pass-band width of 100 nm (from 250 to 350 nm), and a 20dB rejection ratio between deep-UV wavelength and visible wavelength. The filter consists of an aluminum nano-grid, which was made by coating 20 nm Al on a SiO(2) square grid with 190 n...

A micro- and nanoscale complex structure made of a high refractive index polymer (n = 2.08) was formed on the ITO electrode layer of an edge-emitting type GaN blue light-emitting diode (LED), in order to improve the photon extraction efficiency by suppressing total internal reflection of photons. The nanoimprint lithography process was used to form the micro- and nanoscale complex structures, u...

Nanoparticle image velocimetry (nano-PIV), based on total internal reflection fluorescent microscopy, is very useful to investigate fluid flows within approximately 100 nm from a surface; but so far it has only been applied to flow over smooth surfaces. Here we show that it can also be applied to flow over a topologically structured surface, provided that the surface structures can be carefully...

Metallic nano-particle pairs in close proximity to one another display surface-enhanced Raman scattering (SERS). Single-molecule detection has been predicted to be possible thanks to SERS. The SERS enhancement can be maximized by simultaneously increasing the curvature of the particles and bringing them into close proximity to one another. The field intensity has been predicted to increase expo...

Optical imaging and photolithography promise broad applications in nano-electronics, metrologies, and single-molecule biology. Light diffraction however sets a fundamental limit on optical resolution, and it poses a critical challenge to the down-scaling of nano-scale manufacturing. Surface plasmons have been used to circumvent the diffraction limit as they have shorter wavelengths. However, th...