Metrology applications commonly require non-contact, capacitive sensors for displacement measurements due to their nanometer resolution. In some metrology applications, for example, the measurement of roundness and spindle error motion, the displacements of stationary and rotating cylindrical artifacts are measured. Error from using a conventionally calibrated sensor with a non-flat (e.g., cyli...

Surface texture and its measurement are becoming the most critical factors and important functionality indicators in the performance of high precision and nanoscale devices and components. Surface metrology as a discipline is currently undergoing a huge paradigm shift: from profile to areal characterization, from stochastic to structured surfaces, and from simple geometries to complex free-form...

Some topics never fade away but also advance. Software metrology seems to be one of those. Let’s revisit it here.

This article investigates how to adaptively predict the time-varying metrology delay that could realistically occur in the semiconductor manufacturing practice. Metrology delays pose a great challenge for the existing run-to-run (R2R) controllers, driving the process output significantly away from target if not adequately predicted. First, the expected asymptotic double exponentially weighted m...

This study presents the synthesis and characterization of TiN hard coatings as a candidate reference material for surface metrology in chemistry. were grown on silicon wafer with (111) orientation using dc reactive magnetron sputtering. X-ray diffraction confirms that phase is polycrystalline, electron microscopy demonstrates pyramidal-shaped grains ranging from sub-micrometer to nano-size scal...

C. Jassadajin , C. Kurupakorn , N. Khumthukthit , A. Pruksanubal *4 # Electrical Metrology Department, National Institute of Metrology (Thailand) 3/4-5 Moo 3, Klong 5, Klong Luang, Pathumthani 12120 THAILAND 1 [email protected] 2 [email protected] 3 [email protected] * Department of Electrical Engineering, King Mongkut’s University of Technology North Bangkok 1518 Phiboonsongkram Road, ...

The measurement accuracy of an interferometric optical test is generally limited by the environment. This paper discusses two single-shot interferometric techniques for reducing the sensitivity of an optical test to vibration; simultaneous phase-shifting interferometry and spatial carrier interferometry. ©2004 Optical Society of America OCIS codes: (120.0120) Instrumentation, measurement and me...