نتایج جستجو برای: pecvd reactor

تعداد نتایج: 30231  

Journal: :Journal of Materials Engineering and Performance 2023

Abstract In this study, siloxane has been used for the protection of metal artifacts from corrosion in form transparent barrier coating films because their good adhesion to substrate. The effect oxygen plasma pre-treatment on properties thin film silver-copper alloy substrate was investigated. Radiofrequency plasma-enhanced chemical vapor deposition (RF-PECVD) process. Surface identification an...

Journal: :Applied Surface Science 2021

The homoepitaxy of Si is particularly interesting for the purpose kerfless wafer production, example in photovoltaic domain. Substrate surface engineering a key step prior to epitaxial growth, which will affect quality layer and its detachment transfer. In this work, we propose two plasma-based methods including deposition bilayer homoepitaxial interface SiGe heteroepitaxial interface. Their im...

Journal: :Coatings 2021

ZnO thin films were synthesized on silicon and glass substrates using the plasma-enhanced chemical vapor deposition (PECVD) technique. Three samples prepared at temperatures of 200, 300, 400 °C. The surface composition was analyzed by use X-Ray Photoelectron spectroscopy (XPS). Structural morphological properties studied X-ray diffraction (XRD) scanning electron microscopy (SEM). Optical carrie...

Journal: :ACS Applied Materials & Interfaces 2021

The development of an in situ nonthermal plasma technology improved the oxidation and energy release boron nanoparticles. We reduced native oxide layer on surface nanoparticles (70 nm) by treatment a hydrogen plasma, followed formation passivation barrier argon plasma-enhanced chemical vapor deposition (PECVD) using perfluorodecalin (C10F18). Both processes occur near room temperature, thus avo...

2007
H. Ceric S. Selberherr

We present a model for build-up of intrinsic stress during the deposition of thin metal films. The model assumes a three-phase stress generation mechanism which corresponds to three characteristic phases of microstructure evolution. The simulation results based on the model are successfully compared with experimental results for Poly-SiGe PECVD films. The impact of critical parameter variation ...

2008
Tobias Pröll Philipp Kolbitsch

A fluidized bed system combining two circulating fluidized bed reactors is proposed and investigated for chemical looping combustion using metal oxides as oxygen carriers. The global solids loop starts in one of the two reactors (primary reactor) where solids are entrained, separated from the gas in a cyclone and sent to the other reactor (secondary reactor) via a fluidized loop seal. From the ...

2001
X. Deng W. Wang X. B. Liao S. Han H. Povolny X. B. Xiang

Triple-junction a-Si/a-SiGe/a-SiGe solar cells are fabricated in our laboratory using a multi-chamber, loadlocked PECVD system. By improving intrinsic layers, doped layers and using bandgap graded buffer layers for aSiGe component cells, we improved our triple-cell performance and achieved a 12.71% initial efficiency and a 10.7% stable efficiency after 1000 hours of 1-sun light soaking. Samples...

Journal: :Nano letters 2008
Liangti Qu Feng Du Liming Dai

We have combined fast heating with plasma enhanced chemical vapor deposition (PECVD) for preferential growth of semiconducting vertically aligned single-walled carbon nanotubes (VA-SWNTs). Raman spectroscopic estimation indicated a high yield of up to 96% semiconducting SWNTs in the VA-SWNT array. The as-synthesized semiconducting SWNTs can be used directly for fabricating FET devices without t...

2003
M. E. Sawan

The neutron yield in a D-He reactor is much lower than that in a D-T reactor of equivalent power. Therefore, the rate of neutron damage and gas production in the first wall of D-He reactors is lower by more than an order of magnitude. Whereas different structural materials proposed for use in commercial fusion reactors will last the reactor lifetime of 30 full power years in a D-He reactor, fre...

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