Piezoelectric thin films offer a number of advantages in various applications, such as high energy density harvesters, a wide dynamic range, and high sensitivity sensors, as well as large displacement and low power consumption actuators. This review covers the available material forms and applications of piezoelectric thin films: lead zirconate titanate (PZT)-based thin films, lead-free piezoel...

Synthetic jets have been identified and utilized widely in airflow control applications. These jets of air are usually created by the use of compressed air, or an electromechanically driven vibrating platform. All of these approaches produce desired results in airflow-control such as enhanced lift and increased maneuverability. Despite the results however, system weight, size, response time and...

Piezoelectric materials show nonlinear hysteresis behaviour when they are under high electrical field and mechanical load. Fundamental study of PEA depicts that the Hysteresis effect deteriorate the tracking performance of The PEA. This paper proposes a nonlinear model which quantifies the Hysteresis nonlinearity generated in Piezoactuators in response to applied driving voltages. A novel perfe...

Abstract: In many industrial applications like semiconductor production and optical inspection systems, the availability of positioning systems capable to follow trajectory paths in the range of several centimetres, featuring at the same time a nanometre-range precision, is demanding. Pure piezoelectric stages and standard positioning systems with motor and spindle are not able to meet such req...

This paper describes MEMS deformable polymer mirror system for adaptive optics application. This system employs a 4 μm thick SU-8 membrane with a stress balanced double side aluminum coating as a mirror element. Underlying Lorentz actuators are used to control the surface topography of the mirror, enabling optical wavefront correction. Compared to electrostatic, piezoelectric, and thermal actua...

An analytical solution for a sandwich circular FGM plate coupled with piezoelectric layers under one-dimension heat conduction is presented in this paper. A nonlinear static problem is solved first to determine the initial stress state and pre-vibration deformations. By adding an incremental dynamic state to the pre-vibration state, the differential equations are derived. The role of thermal en...

Positioning stages using piezoelectric stack actuators (PEA) possess very high theoretical bandwidth and resolution. However, their tracking performance deteriorates as nonlinear dynamics due to inherent hysteresis starts to dominate when the total length of travel increases. When tracking periodic trajectories, which is common in most industrial applications, the uncertain nonlinearity from hy...

In this article, a novel control method is proposed for feedforward compensation of hysteresis non-linearity in various frequency ranges. By integrating a multirate hysteresis compensator controller with PID feedback control, a combined controller is developed and experimentally validated for a piezoelectric micro-positioning system. Piezoelectric materials show non-linear hysteresis behaviour ...

Abstract: Electromechanical coupling defines the ratio of electrical and mechanical energy exchanged during a flexure cycle of a piezoelectric actuator. This paper presents an analysis of the dynamic electromechanical coupling factor (dynamic EMCF) for cantilever based piezoelectric actuators and provides for the first time explicit expressions for calculation of dynamic EMCF based on arrangeme...

The design and analysis of piezoelectric actuators is rarely optimized for low mass applications. However, emerging technologies such as micro air vehicles, and microrobotics in general, demand high force, high displacement, low mass actuators. Utilization of generic piezoceramics and high performance composite materials coupled with intelligent use of geometry and novel driving techniques yiel...