Absorption losses and laser-induced damage threshold (LIDT) are considered to be the major constraints for development of optical coatings high-power laser optics. Such require paramount properties, such as low due absorption, high mechanical stability, enhanced resistance, withstand high-intensity pulses. In this work, heterostructures were developed by sub-nanometer thin films SiO2 HfO2 using...

This work consists of optimizing TiN plasma-enhanced atomic layer deposition using two different N-sources: NH[Formula: see text] and N[Formula: text]. In addition to maximizing the growth per cycle (GPC) shorten duration, comprehensive in situ ex physicochemical characterizations give valuable information about influence N-source nature, their dilution Ar, plasma power on layer’s final propert...

Zirconium oxides were deposited using plasma-enhanced atomic layer deposition (PEALD) involving (2-(N-methylamino)1-MethylEthyleneCyclopentadienyl)Bis(DiMethylAmino)Zr (abbreviated as CMEN-Zr) and oxygen plasma zirconium sources. The oxide thin films demonstrate temperature-independent growth rates per cycle of 0.94 A/cycle at 150–215 °C. ZrO2 characterized numerous analytical tools, i.e., X-ra...

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