We investigate the synchronization of oscillators based on anharmonic nanoelectromechanical resonators. Our experimental implementation allows unprecedented observation and control of parameters governing the dynamics of synchronization. We find close quantitative agreement between experimental data and theory describing reactively coupled Duffing resonators with fully saturated feedback gain. ...

In this tutorial, we cover the effect of nonlinear spring forces on (micro)resonators. The motivation of analysis is: i. to understand the nonlinear effects observed with real resonators and ii. to estimate the maximum vibration amplitude where vibrations are almost linear. Knowing the range for linear vibrations sets the dynamic range for resonators. On the lower end, the usable range is limit...

Nanomechanical resonators can now be realized that achieve fundamental resonance frequencies exceeding 1 GHz, with quality factors ~Q! in the range 10<Q<10. The minuscule active masses of these devices, in conjunction with their high Qs, translate into unprecedented inertial mass sensitivities. This makes them natural candidates for a variety of mass sensing applications. Here we evaluate the u...

Electroacoustic resonators employing surface acoustic waves (SAW) are commercially widely used in RF filters, low noise frequency sources as well as various sensors. In all of these applications the resonance quality factor appears to be a limiting performance factor. Quite often practical Q factors are not limited by the materials, but by design deficiencies, enabling energy loss outside the r...

SiC is an extremely promising material for nanoelectromechanical systems given its large Young’s modulus and robust surface properties. We have patterned nanometer scale electromechanical resonators from single-crystal 3C-SiC layers grown epitaxially upon Si substrates. A surface nanomachining process is described that involves electron beam lithography followed by dry anisotropic and selective...

As new synthetic, low-loss polymers are developed, polymer optical cavities are experiencing a revolution, in both fabrication design and functionality. Recently, a fabrication technique was developed that enabled planar arrays of polymeric resonators to achieve cavity Q factors greater than 1 million. In the present letter, this molding technique is expanded to fabricate resonators from polyme...

Coupled resonators are widely used in the design of filters with dual-passband responses. In this paper, we present a dual-band bandpass filter using only couplings between adjacent resonators without cross-couplings. The dual-band bandpass filter with centre frequencies of 1747MHz and 1879MHz respectively is designed and fabricated using microstrip U-shaped resonators. Using the coupled resona...

A selective electrothermal magnetic annealing technique is introduced that provides programming capabilities for mechanical micro-resonators. In the proposed approach the magnetic properties of resonators can be locally tuned in a post-fabrication batch-compatible process step. A prototype is implemented in a standard microfabrication process, where resonating ferromagnetic elements are suspend...

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We demonstrate a process to fabricate silicon photonic devices directly on a plastic film which is both flexible and transparent. This process allows the integration of complex structures on plastic films without the need of transferring from another substrate. Waveguides, grating couplers, and microring resonators are fabricated and optically characterized. An optical strain sensor is shown as...