نتایج جستجو برای: rf reactive magnetron sputtering
تعداد نتایج: 196306 فیلتر نتایج به سال:
Multicomponent TeO2–Bi2O3–ZnO (TBZ) glass thin films were prepared using RF magnetron sputtering under different oxygen flow rates. The influences of oxygen flow rate on the structural and optical properties of the resulting thin films were investigated. We observed that thin films sputtered in an oxygen-rich environment are optically transparent while those sputtered in an oxygen-deficient env...
The structural and electrochemical properties of RuPt thin-film electrodes fabricated by radio frequency (rf) magnetron sputtering have been investigated. Grazing incidence X-ray diffraction data show a transition from a face-centered cubic (fcc) to hexagonal cubic-packed (hcp) structure as the Ru percentage increases. The transition occurs gradually between 32 and 58% Ru, which is significantl...
Artificial PbTiO3/SrTiO3 superlattices were constructed using off-axis rf magnetron sputtering. X-ray diffraction and piezoelectric atomic force microscopy were used to study the evolution of the ferroelectric polarization as the ratio of PbTiO3 to SrTiO3 was changed. For PbTiO3 layer thicknesses larger than the 3-unit cell SrTiO3 thickness used in the structure, the polarization is found to be...
Composite titanium carbonitride (TiCN) thin films deposited on AZ31 by DC/RF magnetron sputtering were vacuum annealed at different temperatures. Vacuum annealing yields the following on the structure and properties of the films: the grain grows and the roughness increases with an increase of annealing temperature, the structure changes from polycrystalline to single crystal, and the distributi...
Magnetron sputtering has become the process of choice for the deposition of a wide range of industrially important coatings. Examples include hard, wear-resistant coatings, low friction coatings, corrosion resistant coatings, decorative coatings and coatings with speci"c optical, or electrical properties. Although the basic sputtering process has been known and used for many years, it is the de...
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