نتایج جستجو برای: sputter deposition

تعداد نتایج: 97899  

2002
Jinfeng Kang Dedong Han Chi Ren Hong Yang Dechao Guo Wei Wang Dayu Tian Jinhua Zhang Yake Wang Xiaoyan Liu Ruqi Han

Electrical properties, current transport mechanism, and stress induced leakage current (SILC) effect of Al2O3 gate dielectric thin films deposited by reactive dc magnetron sputtering were studied. The results show that annealing in O2 ambient can effectively reduce the oxygen vacancy in Al2O3 films but may not result in additional interfacial layer form at Al2O3/Si interface. In the fresh devic...

2005
Z. G. Yin H. T. Zhang D. M. Goodner M. J. Bedzyk R. P. H. Chang J. B. Ketterson

We present results on the in situ, two-dimensional growth sas opposed to the more commonly encountered island-coalescence mechanismd of continuous epitaxial Cu2O films on MgOs011d using dc facing-magnetron sputtering from metallic Cu targets in an oxygen/argon atmosphere. Film growth was studied as a function of deposition time and the dc power applied to the guns. Control of the latter leads t...

2010
D. Perez de Lara A. Alija E. M. Gonzalez M. Velez J. I. Martin J. L. Vicent

Arrays of Ni nanodots embedded in Nb superconducting films have been fabricated by sputtering and electron-beam lithography techniques. The arrays are periodic triangular lattices of circular Ni dots arranged in a kagomélike pattern with broken reflection symmetry. Relevant behaviors are found in the vortex lattice dynamics: i at values lower than the first integer matching field, several fract...

2012
L. Tumbek C. Gleichweit K. Zojer A. Winkler

Ultrathin films of para-hexaphenyl (6P ) were prepared on freshly cleaved and sputter-amorphized mica(001) by physical vapor deposition. Ex situ atomic force microscopy (AFM) revealed a bimodal island size distribution for the films on both surfaces. On freshly cleaved mica long needlelike islands exist, which are surrounded by small crystallites. On the sputter-amorphized substrates, large den...

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