As device geometry continues to shrink, micro-contaminants have an increasingly negative impact on yield. By diminishing the contamination problem, semiconductor manufacturers will significantly improve the wafer yield. This paper presents a comprehensive and successful application of data mining methodologies to the refinement of a new dry cleaning technology that utilizes a laser beam for the...

Micro-domes based on a combination of metallic and dielectric multilayer mirrors are studied using a fully vectorial numerical basis-expansion method that accurately accounts for the effects of an arbitrary Bragg stack and can efficiently cover a large range of dome shapes and sizes. Results are examined from three different viewpoints: (i) the ray-optics limit, (ii) the (semi-) confocal limit ...

In this paper, the nonlinear free vibration of fiber-reinforced lamina micro-switches is investigated, and a sensitivity analysis (SA) is given. The switches are modeled as solid rectangular beams consisting of an isotropic matrix with transversely and longitudinally isotropic reinforcements, incorporating a higher order Hamiltonian approach. An SA of the proposed micro-switch is presented by c...

friction stir processing was applied for fabricating an aluminum alloy based hybrid nano composite reinforced with nano sized al2o3 and micro sized graphite particles. a mixture of al2o3 and graphite particles was packed into a groove with 1 mm width and 4.5 mm depth, which had been cut in 5083 aluminum plate of 10 mm thick. packed groove was subjected to friction stir processing in order to im...

Der Entwurf von Steuerungen und die Trajektorienplanung für lineare Systeme mit örtlich verteilten Parametern und konzentrierten Stelleingriffen können in gewissen Fällen auf der Basis von Potenzreihendarstellungen erfolgen. Es wird eine Methode vorgestellt, mit der diese Reihendarstellungen systematisch auch für solche partiellen Differentialgleichungen hergeleitet werden können, deren Koeffiz...

OBJECTIVE The aim of this study was to evaluate the effect of multiple layers of an infection control barrier on the micro-hardness of a composite resin. MATERIAL AND METHODS One, two, four, and eight layers of an infection control barrier were used to cover the light guides of a high-power light emitting diode (LeD) light curing unit (LCU) and a low-power halogen LCU. The composite specimens...

introduction: the aim of this study was to evaluate the influenceof different light curing systems and curing times on the micro-hardness of aresin modified glass ionomer. methods: forty two samples of resinmodified glass ionomer (rmgi) were prepared using stainless steel cylindrical mold(8 × 2 mm) and randomly divided into six groups of seven. three groups werecured with a quartz tungsten halo...

In this paper, we develop a mixed-initiative intelligent tutor for the game of Sudoku called MITS. We begin by developing a characterization of the strategies used in Sudoku as the basis for teaching the student how to play. In order to reason about interaction with the student, we also introduce a student modeling component motivated by the mixed-initiative model of Fleming and Cohen that trac...

1813-8235 (Print), 2070-8998 (Online) © 2008 ANAME Publication. All rights reserved. Received on: 1 Oct. 2008 THERMAL RADIATION EFFECTS ON MHD FREE CONVECTION FLOW PAST AN IMPULSIVELY STARTED VERTICAL PLATE WITH VARIABLE SURFACE TEMPERATURE AND CONCENTRATION S. Suneetha, N. Bhaskar Reddy and V. Ramachandra Prasad Department of Mathematics, Sri Venkateswara University, Tirupati 517502, A. P., IN...